JPS5153491A - - Google Patents
Info
- Publication number
- JPS5153491A JPS5153491A JP50107586A JP10758675A JPS5153491A JP S5153491 A JPS5153491 A JP S5153491A JP 50107586 A JP50107586 A JP 50107586A JP 10758675 A JP10758675 A JP 10758675A JP S5153491 A JPS5153491 A JP S5153491A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7430623A FR2284981A1 (fr) | 1974-09-10 | 1974-09-10 | Procede d'obtention d'un circuit integre semiconducteur |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5153491A true JPS5153491A (2) | 1976-05-11 |
| JPS5744017B2 JPS5744017B2 (2) | 1982-09-18 |
Family
ID=9142928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50107586A Expired JPS5744017B2 (2) | 1974-09-10 | 1975-09-06 |
Country Status (10)
| Country | Link |
|---|---|
| JP (1) | JPS5744017B2 (2) |
| AT (1) | AT359562B (2) |
| CA (1) | CA1035470A (2) |
| CH (1) | CH591163A5 (2) |
| DE (1) | DE2538264C3 (2) |
| FR (1) | FR2284981A1 (2) |
| GB (1) | GB1518988A (2) |
| IT (1) | IT1042339B (2) |
| NL (1) | NL7510427A (2) |
| SE (1) | SE415421B (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH053192A (ja) * | 1991-10-25 | 1993-01-08 | Matsushita Electron Corp | 半導体集積回路 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5496775A (en) * | 1978-01-17 | 1979-07-31 | Hitachi Ltd | Method of forming circuit |
| FR2535525A1 (fr) * | 1982-10-29 | 1984-05-04 | Western Electric Co | Procede de fabrication de circuits integres comportant des couches isolantes minces |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3979768A (en) * | 1966-03-23 | 1976-09-07 | Hitachi, Ltd. | Semiconductor element having surface coating comprising silicon nitride and silicon oxide films |
| FR1536321A (fr) * | 1966-06-30 | 1968-08-10 | Texas Instruments Inc | Contacts ohmiques pour des dispositifs à semi-conducteurs |
| FR1531852A (fr) * | 1966-07-15 | 1968-07-05 | Itt | Procédé de masquage de la surface d'un support |
| US3474310A (en) * | 1967-02-03 | 1969-10-21 | Hitachi Ltd | Semiconductor device having a sulfurtreated silicon compound thereon and a method of making the same |
| US3442012A (en) * | 1967-08-03 | 1969-05-06 | Teledyne Inc | Method of forming a flip-chip integrated circuit |
| DE2059116C3 (de) * | 1970-12-01 | 1974-11-21 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zur Herstellung eines Halbleiterbauelementes |
| GB1363815A (en) * | 1971-12-06 | 1974-08-21 | Tektronix Inc | Semiconductor device and method of producing same |
| JPS4960870A (2) * | 1972-10-16 | 1974-06-13 |
-
1974
- 1974-09-10 FR FR7430623A patent/FR2284981A1/fr active Granted
-
1975
- 1975-08-28 DE DE2538264A patent/DE2538264C3/de not_active Expired
- 1975-09-04 NL NL7510427A patent/NL7510427A/xx not_active Application Discontinuation
- 1975-09-04 CA CA234,787A patent/CA1035470A/en not_active Expired
- 1975-09-05 CH CH1153875A patent/CH591163A5/xx not_active IP Right Cessation
- 1975-09-05 IT IT26982/75A patent/IT1042339B/it active
- 1975-09-05 GB GB36624/75A patent/GB1518988A/en not_active Expired
- 1975-09-06 JP JP50107586A patent/JPS5744017B2/ja not_active Expired
- 1975-09-08 AT AT692075A patent/AT359562B/de not_active IP Right Cessation
- 1975-09-08 SE SE7509970A patent/SE415421B/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH053192A (ja) * | 1991-10-25 | 1993-01-08 | Matsushita Electron Corp | 半導体集積回路 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2538264B2 (de) | 1981-04-30 |
| CA1035470A (en) | 1978-07-25 |
| ATA692075A (de) | 1980-04-15 |
| DE2538264A1 (de) | 1976-03-18 |
| CH591163A5 (2) | 1977-09-15 |
| AT359562B (de) | 1980-11-25 |
| IT1042339B (it) | 1980-01-30 |
| JPS5744017B2 (2) | 1982-09-18 |
| SE7509970L (sv) | 1976-03-11 |
| FR2284981A1 (fr) | 1976-04-09 |
| NL7510427A (nl) | 1976-03-12 |
| AU8461075A (en) | 1977-03-17 |
| DE2538264C3 (de) | 1982-01-14 |
| GB1518988A (en) | 1978-07-26 |
| FR2284981B1 (2) | 1978-11-24 |
| SE415421B (sv) | 1980-09-29 |