JPS5744017B2 - - Google Patents

Info

Publication number
JPS5744017B2
JPS5744017B2 JP50107586A JP10758675A JPS5744017B2 JP S5744017 B2 JPS5744017 B2 JP S5744017B2 JP 50107586 A JP50107586 A JP 50107586A JP 10758675 A JP10758675 A JP 10758675A JP S5744017 B2 JPS5744017 B2 JP S5744017B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50107586A
Other languages
Japanese (ja)
Other versions
JPS5153491A (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5153491A publication Critical patent/JPS5153491A/ja
Publication of JPS5744017B2 publication Critical patent/JPS5744017B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Weting (AREA)
JP50107586A 1974-09-10 1975-09-06 Expired JPS5744017B2 (2)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7430623A FR2284981A1 (fr) 1974-09-10 1974-09-10 Procede d'obtention d'un circuit integre semiconducteur

Publications (2)

Publication Number Publication Date
JPS5153491A JPS5153491A (2) 1976-05-11
JPS5744017B2 true JPS5744017B2 (2) 1982-09-18

Family

ID=9142928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50107586A Expired JPS5744017B2 (2) 1974-09-10 1975-09-06

Country Status (10)

Country Link
JP (1) JPS5744017B2 (2)
AT (1) AT359562B (2)
CA (1) CA1035470A (2)
CH (1) CH591163A5 (2)
DE (1) DE2538264C3 (2)
FR (1) FR2284981A1 (2)
GB (1) GB1518988A (2)
IT (1) IT1042339B (2)
NL (1) NL7510427A (2)
SE (1) SE415421B (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5496775A (en) * 1978-01-17 1979-07-31 Hitachi Ltd Method of forming circuit
FR2535525A1 (fr) * 1982-10-29 1984-05-04 Western Electric Co Procede de fabrication de circuits integres comportant des couches isolantes minces
JPH053192A (ja) * 1991-10-25 1993-01-08 Matsushita Electron Corp 半導体集積回路

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3979768A (en) * 1966-03-23 1976-09-07 Hitachi, Ltd. Semiconductor element having surface coating comprising silicon nitride and silicon oxide films
FR1536321A (fr) * 1966-06-30 1968-08-10 Texas Instruments Inc Contacts ohmiques pour des dispositifs à semi-conducteurs
FR1531852A (fr) * 1966-07-15 1968-07-05 Itt Procédé de masquage de la surface d'un support
US3474310A (en) * 1967-02-03 1969-10-21 Hitachi Ltd Semiconductor device having a sulfurtreated silicon compound thereon and a method of making the same
US3442012A (en) * 1967-08-03 1969-05-06 Teledyne Inc Method of forming a flip-chip integrated circuit
DE2059116C3 (de) * 1970-12-01 1974-11-21 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Herstellung eines Halbleiterbauelementes
GB1363815A (en) * 1971-12-06 1974-08-21 Tektronix Inc Semiconductor device and method of producing same
JPS4960870A (2) * 1972-10-16 1974-06-13

Also Published As

Publication number Publication date
DE2538264B2 (de) 1981-04-30
CA1035470A (en) 1978-07-25
ATA692075A (de) 1980-04-15
DE2538264A1 (de) 1976-03-18
CH591163A5 (2) 1977-09-15
AT359562B (de) 1980-11-25
IT1042339B (it) 1980-01-30
SE7509970L (sv) 1976-03-11
FR2284981A1 (fr) 1976-04-09
NL7510427A (nl) 1976-03-12
JPS5153491A (2) 1976-05-11
AU8461075A (en) 1977-03-17
DE2538264C3 (de) 1982-01-14
GB1518988A (en) 1978-07-26
FR2284981B1 (2) 1978-11-24
SE415421B (sv) 1980-09-29

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