JPS5216178A - Airtightness testing device - Google Patents

Airtightness testing device

Info

Publication number
JPS5216178A
JPS5216178A JP9230075A JP9230075A JPS5216178A JP S5216178 A JPS5216178 A JP S5216178A JP 9230075 A JP9230075 A JP 9230075A JP 9230075 A JP9230075 A JP 9230075A JP S5216178 A JPS5216178 A JP S5216178A
Authority
JP
Japan
Prior art keywords
testing device
airtightness testing
airtightness
optically
electrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9230075A
Other languages
Japanese (ja)
Inventor
Noboru Kawai
Osamu Hayashi
Keizo Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP9230075A priority Critical patent/JPS5216178A/en
Publication of JPS5216178A publication Critical patent/JPS5216178A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: To test airtightness of the semiconductor device by detecting air bubbles optically and electrically.
COPYRIGHT: (C)1977,JPO&Japio
JP9230075A 1975-07-28 1975-07-28 Airtightness testing device Pending JPS5216178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9230075A JPS5216178A (en) 1975-07-28 1975-07-28 Airtightness testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9230075A JPS5216178A (en) 1975-07-28 1975-07-28 Airtightness testing device

Publications (1)

Publication Number Publication Date
JPS5216178A true JPS5216178A (en) 1977-02-07

Family

ID=14050549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9230075A Pending JPS5216178A (en) 1975-07-28 1975-07-28 Airtightness testing device

Country Status (1)

Country Link
JP (1) JPS5216178A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754832A (en) * 1980-09-19 1982-04-01 Hitachi Ltd Airtight inspection
JPS57173544A (en) * 1981-04-17 1982-10-25 Susumu Ariga Fuel controller of carburetor
JPS582630A (en) * 1981-06-29 1983-01-08 Taikoushiya:Kk Leakage checking device
JPS5853666A (en) * 1981-09-25 1983-03-30 Japan Electronic Control Syst Co Ltd Controller for electronic control carbureter
JPS5858826U (en) * 1981-10-14 1983-04-21 株式会社東芝 Aggregate structure of cylindrical equipment
JPS5954936A (en) * 1982-09-22 1984-03-29 Sanshu Press Kogyo Kk Bubble detector
US4924694A (en) * 1988-08-22 1990-05-15 Expertek, Inc. Apparatus for leak testing a fluid containing chamber
US5054311A (en) * 1989-12-11 1991-10-08 Expertek, Inc. Fully automated leak testing apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754832A (en) * 1980-09-19 1982-04-01 Hitachi Ltd Airtight inspection
JPS57173544A (en) * 1981-04-17 1982-10-25 Susumu Ariga Fuel controller of carburetor
JPS582630A (en) * 1981-06-29 1983-01-08 Taikoushiya:Kk Leakage checking device
JPS5853666A (en) * 1981-09-25 1983-03-30 Japan Electronic Control Syst Co Ltd Controller for electronic control carbureter
JPS5858826U (en) * 1981-10-14 1983-04-21 株式会社東芝 Aggregate structure of cylindrical equipment
JPS5954936A (en) * 1982-09-22 1984-03-29 Sanshu Press Kogyo Kk Bubble detector
US4924694A (en) * 1988-08-22 1990-05-15 Expertek, Inc. Apparatus for leak testing a fluid containing chamber
US5054311A (en) * 1989-12-11 1991-10-08 Expertek, Inc. Fully automated leak testing apparatus

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