JPS5219972A - Non-crystal semiconductor master manufacturing process - Google Patents

Non-crystal semiconductor master manufacturing process

Info

Publication number
JPS5219972A
JPS5219972A JP9595175A JP9595175A JPS5219972A JP S5219972 A JPS5219972 A JP S5219972A JP 9595175 A JP9595175 A JP 9595175A JP 9595175 A JP9595175 A JP 9595175A JP S5219972 A JPS5219972 A JP S5219972A
Authority
JP
Japan
Prior art keywords
manufacturing process
crystal semiconductor
master manufacturing
semiconductor master
noncrystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9595175A
Other languages
Japanese (ja)
Inventor
Tomoaki Sakai
Yasushi Utsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9595175A priority Critical patent/JPS5219972A/en
Publication of JPS5219972A publication Critical patent/JPS5219972A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To provide a manufacturing process of a master which prevents relief patterns to drop of the base in the case of molding reproduction using noncrystal semiconductors.
COPYRIGHT: (C)1977,JPO&Japio
JP9595175A 1975-08-08 1975-08-08 Non-crystal semiconductor master manufacturing process Pending JPS5219972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9595175A JPS5219972A (en) 1975-08-08 1975-08-08 Non-crystal semiconductor master manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9595175A JPS5219972A (en) 1975-08-08 1975-08-08 Non-crystal semiconductor master manufacturing process

Publications (1)

Publication Number Publication Date
JPS5219972A true JPS5219972A (en) 1977-02-15

Family

ID=14151556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9595175A Pending JPS5219972A (en) 1975-08-08 1975-08-08 Non-crystal semiconductor master manufacturing process

Country Status (1)

Country Link
JP (1) JPS5219972A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924367A (en) * 1972-06-28 1974-03-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924367A (en) * 1972-06-28 1974-03-04

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