JPS5240976A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5240976A JPS5240976A JP50116364A JP11636475A JPS5240976A JP S5240976 A JPS5240976 A JP S5240976A JP 50116364 A JP50116364 A JP 50116364A JP 11636475 A JP11636475 A JP 11636475A JP S5240976 A JPS5240976 A JP S5240976A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- films
- electrical insulating
- polarization effect
- insulating films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 230000010287 polarization Effects 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To use SiC for at least 1 of electrical insulating films or protection films of a semiconductor device thereby improving hygroscopicity resistance and reducing polarization effect.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50116364A JPS5240976A (en) | 1975-09-29 | 1975-09-29 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50116364A JPS5240976A (en) | 1975-09-29 | 1975-09-29 | Semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5240976A true JPS5240976A (en) | 1977-03-30 |
Family
ID=14685123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50116364A Pending JPS5240976A (en) | 1975-09-29 | 1975-09-29 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5240976A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62174925A (en) * | 1986-01-28 | 1987-07-31 | Sharp Corp | Oxidization of silicon carbide semiconductor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49107177A (en) * | 1973-02-13 | 1974-10-11 |
-
1975
- 1975-09-29 JP JP50116364A patent/JPS5240976A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49107177A (en) * | 1973-02-13 | 1974-10-11 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62174925A (en) * | 1986-01-28 | 1987-07-31 | Sharp Corp | Oxidization of silicon carbide semiconductor |
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