JPS5240983A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5240983A
JPS5240983A JP11679375A JP11679375A JPS5240983A JP S5240983 A JPS5240983 A JP S5240983A JP 11679375 A JP11679375 A JP 11679375A JP 11679375 A JP11679375 A JP 11679375A JP S5240983 A JPS5240983 A JP S5240983A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
germanium nitride
source
fet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11679375A
Other languages
Japanese (ja)
Inventor
Yoshiki Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11679375A priority Critical patent/JPS5240983A/en
Publication of JPS5240983A publication Critical patent/JPS5240983A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent disconnection of electrode wiring formed on germanium nitride by using the germanium nitride as a diffusion source, thereby obtaining an FET having shallow source and drain regions.
COPYRIGHT: (C)1977,JPO&Japio
JP11679375A 1975-09-26 1975-09-26 Process for production of semiconductor device Pending JPS5240983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11679375A JPS5240983A (en) 1975-09-26 1975-09-26 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11679375A JPS5240983A (en) 1975-09-26 1975-09-26 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5240983A true JPS5240983A (en) 1977-03-30

Family

ID=14695814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11679375A Pending JPS5240983A (en) 1975-09-26 1975-09-26 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5240983A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051664U (en) * 1973-08-09 1975-05-19
JP2013026473A (en) * 2011-07-21 2013-02-04 Hitachi Chem Co Ltd Impurity diffusion layer formation composition, manufacturing method of impurity diffusion layer, and manufacturing method of solar cell element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051664U (en) * 1973-08-09 1975-05-19
JP2013026473A (en) * 2011-07-21 2013-02-04 Hitachi Chem Co Ltd Impurity diffusion layer formation composition, manufacturing method of impurity diffusion layer, and manufacturing method of solar cell element

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