JPS5265686A - Production of mos semiconductor device - Google Patents

Production of mos semiconductor device

Info

Publication number
JPS5265686A
JPS5265686A JP50143191A JP14319175A JPS5265686A JP S5265686 A JPS5265686 A JP S5265686A JP 50143191 A JP50143191 A JP 50143191A JP 14319175 A JP14319175 A JP 14319175A JP S5265686 A JPS5265686 A JP S5265686A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
mos semiconductor
regions
mos
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50143191A
Other languages
Japanese (ja)
Inventor
Keizo Sakiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP50143191A priority Critical patent/JPS5265686A/en
Publication of JPS5265686A publication Critical patent/JPS5265686A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To improve the dielectric strength of the sourcedrain junction of a MOS semiconductor device by providing a spacing between the source-drain regions and channel stoper regions and using the lowness of the impurity concentration of the semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP50143191A 1975-11-27 1975-11-27 Production of mos semiconductor device Pending JPS5265686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50143191A JPS5265686A (en) 1975-11-27 1975-11-27 Production of mos semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50143191A JPS5265686A (en) 1975-11-27 1975-11-27 Production of mos semiconductor device

Publications (1)

Publication Number Publication Date
JPS5265686A true JPS5265686A (en) 1977-05-31

Family

ID=15332977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50143191A Pending JPS5265686A (en) 1975-11-27 1975-11-27 Production of mos semiconductor device

Country Status (1)

Country Link
JP (1) JPS5265686A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130572A (en) * 1976-04-26 1977-11-01 Nippon Telegr & Teleph Corp <Ntt> Preparation of mis type semiconductor circuit device
US4404579A (en) * 1980-10-28 1983-09-13 Inc. Motorola Semiconductor device having reduced capacitance and method of fabrication thereof
US4591890A (en) * 1982-12-20 1986-05-27 Motorola Inc. Radiation hard MOS devices and methods for the manufacture thereof
JPS61225857A (en) * 1985-03-29 1986-10-07 Nippon Telegr & Teleph Corp <Ntt> Manufacture of complementary semiconductor device
JPS63165857U (en) * 1987-04-17 1988-10-28

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PHILIPS PES REPTS#N26=1971NL *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130572A (en) * 1976-04-26 1977-11-01 Nippon Telegr & Teleph Corp <Ntt> Preparation of mis type semiconductor circuit device
US4404579A (en) * 1980-10-28 1983-09-13 Inc. Motorola Semiconductor device having reduced capacitance and method of fabrication thereof
US4591890A (en) * 1982-12-20 1986-05-27 Motorola Inc. Radiation hard MOS devices and methods for the manufacture thereof
JPS61225857A (en) * 1985-03-29 1986-10-07 Nippon Telegr & Teleph Corp <Ntt> Manufacture of complementary semiconductor device
JPS63165857U (en) * 1987-04-17 1988-10-28

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