JPS5242367A - Method of preventing occurence of crystal defects of silicon wafers - Google Patents

Method of preventing occurence of crystal defects of silicon wafers

Info

Publication number
JPS5242367A
JPS5242367A JP50118144A JP11814475A JPS5242367A JP S5242367 A JPS5242367 A JP S5242367A JP 50118144 A JP50118144 A JP 50118144A JP 11814475 A JP11814475 A JP 11814475A JP S5242367 A JPS5242367 A JP S5242367A
Authority
JP
Japan
Prior art keywords
crystal defects
silicon wafers
occurence
preventing
preventing occurence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50118144A
Other languages
Japanese (ja)
Inventor
Seiji Kawato
Takanori Hayafuji
Chuichi Niwano
Toshihiko Suzuki
Hiroshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP50118144A priority Critical patent/JPS5242367A/en
Publication of JPS5242367A publication Critical patent/JPS5242367A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To prevent occurence of crystal defects by heat treatment after causing strain to be produced in the rear of wafers.
COPYRIGHT: (C)1977,JPO&Japio
JP50118144A 1975-09-30 1975-09-30 Method of preventing occurence of crystal defects of silicon wafers Pending JPS5242367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50118144A JPS5242367A (en) 1975-09-30 1975-09-30 Method of preventing occurence of crystal defects of silicon wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50118144A JPS5242367A (en) 1975-09-30 1975-09-30 Method of preventing occurence of crystal defects of silicon wafers

Publications (1)

Publication Number Publication Date
JPS5242367A true JPS5242367A (en) 1977-04-01

Family

ID=14729151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50118144A Pending JPS5242367A (en) 1975-09-30 1975-09-30 Method of preventing occurence of crystal defects of silicon wafers

Country Status (1)

Country Link
JP (1) JPS5242367A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
JPH0664463U (en) * 1993-02-23 1994-09-13 和彦 湯川 Electric reel fishing tackle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
JPH0664463U (en) * 1993-02-23 1994-09-13 和彦 湯川 Electric reel fishing tackle

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