JPS5243360A - Process for production of silicon wafer - Google Patents

Process for production of silicon wafer

Info

Publication number
JPS5243360A
JPS5243360A JP11770675A JP11770675A JPS5243360A JP S5243360 A JPS5243360 A JP S5243360A JP 11770675 A JP11770675 A JP 11770675A JP 11770675 A JP11770675 A JP 11770675A JP S5243360 A JPS5243360 A JP S5243360A
Authority
JP
Japan
Prior art keywords
production
silicon wafer
agregate
occurs
surface polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11770675A
Other languages
English (en)
Other versions
JPS6019144B2 (ja
Inventor
Hirobumi Shimizu
Takaaki Aoshima
Akira Yoshinaka
Yoshimitsu Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11770675A priority Critical patent/JPS6019144B2/ja
Publication of JPS5243360A publication Critical patent/JPS5243360A/ja
Publication of JPS6019144B2 publication Critical patent/JPS6019144B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP11770675A 1975-10-01 1975-10-01 シリコンウエ−ハの製造法 Expired JPS6019144B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11770675A JPS6019144B2 (ja) 1975-10-01 1975-10-01 シリコンウエ−ハの製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11770675A JPS6019144B2 (ja) 1975-10-01 1975-10-01 シリコンウエ−ハの製造法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP58124711A Division JPS5925231A (ja) 1983-07-11 1983-07-11 シリコンウエ−ハ

Publications (2)

Publication Number Publication Date
JPS5243360A true JPS5243360A (en) 1977-04-05
JPS6019144B2 JPS6019144B2 (ja) 1985-05-14

Family

ID=14718283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11770675A Expired JPS6019144B2 (ja) 1975-10-01 1975-10-01 シリコンウエ−ハの製造法

Country Status (1)

Country Link
JP (1) JPS6019144B2 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413257A (en) * 1977-07-01 1979-01-31 Toshiba Corp Manufacture for plate shape semiconductor mono crystal
JPS5580881A (en) * 1978-12-12 1980-06-18 Nec Corp Polishing method for single-crystal substrate
JPS56173527U (ja) * 1980-05-23 1981-12-22
JPS5885534A (ja) * 1981-11-18 1983-05-21 Komatsu Denshi Kinzoku Kk 半導体シリコン基板の製造法
JPS58116740A (ja) * 1981-12-29 1983-07-12 Fujitsu Ltd 半導体結晶の処理方法
JPS6184075A (ja) * 1984-09-18 1986-04-28 イギリス国 光起電力太陽電池
JPH01244621A (ja) * 1988-03-25 1989-09-29 Shin Etsu Handotai Co Ltd シリコン単結晶基板の表面清浄化方法
JP2003124220A (ja) * 2001-10-10 2003-04-25 Sumitomo Mitsubishi Silicon Corp シリコンウェーハの製造方法及びシリコンウェーハ

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413257A (en) * 1977-07-01 1979-01-31 Toshiba Corp Manufacture for plate shape semiconductor mono crystal
JPS5580881A (en) * 1978-12-12 1980-06-18 Nec Corp Polishing method for single-crystal substrate
JPS56173527U (ja) * 1980-05-23 1981-12-22
JPS5885534A (ja) * 1981-11-18 1983-05-21 Komatsu Denshi Kinzoku Kk 半導体シリコン基板の製造法
JPS58116740A (ja) * 1981-12-29 1983-07-12 Fujitsu Ltd 半導体結晶の処理方法
JPS6184075A (ja) * 1984-09-18 1986-04-28 イギリス国 光起電力太陽電池
JPH01244621A (ja) * 1988-03-25 1989-09-29 Shin Etsu Handotai Co Ltd シリコン単結晶基板の表面清浄化方法
JP2003124220A (ja) * 2001-10-10 2003-04-25 Sumitomo Mitsubishi Silicon Corp シリコンウェーハの製造方法及びシリコンウェーハ

Also Published As

Publication number Publication date
JPS6019144B2 (ja) 1985-05-14

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