JPS5243360A - Process for production of silicon wafer - Google Patents

Process for production of silicon wafer

Info

Publication number
JPS5243360A
JPS5243360A JP11770675A JP11770675A JPS5243360A JP S5243360 A JPS5243360 A JP S5243360A JP 11770675 A JP11770675 A JP 11770675A JP 11770675 A JP11770675 A JP 11770675A JP S5243360 A JPS5243360 A JP S5243360A
Authority
JP
Japan
Prior art keywords
production
silicon wafer
agregate
occurs
surface polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11770675A
Other languages
Japanese (ja)
Other versions
JPS6019144B2 (en
Inventor
Hirobumi Shimizu
Takaaki Aoshima
Akira Yoshinaka
Yoshimitsu Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11770675A priority Critical patent/JPS6019144B2/en
Publication of JPS5243360A publication Critical patent/JPS5243360A/en
Publication of JPS6019144B2 publication Critical patent/JPS6019144B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE: To prevent stacking fault before it occurs, by removing minute impurity agregate after surface polishing.
COPYRIGHT: (C)1977,JPO&Japio
JP11770675A 1975-10-01 1975-10-01 Silicon wafer manufacturing method Expired JPS6019144B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11770675A JPS6019144B2 (en) 1975-10-01 1975-10-01 Silicon wafer manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11770675A JPS6019144B2 (en) 1975-10-01 1975-10-01 Silicon wafer manufacturing method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP58124711A Division JPS5925231A (en) 1983-07-11 1983-07-11 Silicon wafer

Publications (2)

Publication Number Publication Date
JPS5243360A true JPS5243360A (en) 1977-04-05
JPS6019144B2 JPS6019144B2 (en) 1985-05-14

Family

ID=14718283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11770675A Expired JPS6019144B2 (en) 1975-10-01 1975-10-01 Silicon wafer manufacturing method

Country Status (1)

Country Link
JP (1) JPS6019144B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413257A (en) * 1977-07-01 1979-01-31 Toshiba Corp Manufacture for plate shape semiconductor mono crystal
JPS5580881A (en) * 1978-12-12 1980-06-18 Nec Corp Polishing method for single-crystal substrate
JPS56173527U (en) * 1980-05-23 1981-12-22
JPS5885534A (en) * 1981-11-18 1983-05-21 Komatsu Denshi Kinzoku Kk Manufacture of semiconductor silicon
JPS58116740A (en) * 1981-12-29 1983-07-12 Fujitsu Ltd Treating method for semiconductor crystal
JPS6184075A (en) * 1984-09-18 1986-04-28 イギリス国 photovoltaic solar cells
JPH01244621A (en) * 1988-03-25 1989-09-29 Shin Etsu Handotai Co Ltd Method of cleaning surface of silicon single crystal substrate
JP2003124220A (en) * 2001-10-10 2003-04-25 Sumitomo Mitsubishi Silicon Corp Method for manufacturing silicon wafer and silicon wafer

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413257A (en) * 1977-07-01 1979-01-31 Toshiba Corp Manufacture for plate shape semiconductor mono crystal
JPS5580881A (en) * 1978-12-12 1980-06-18 Nec Corp Polishing method for single-crystal substrate
JPS56173527U (en) * 1980-05-23 1981-12-22
JPS5885534A (en) * 1981-11-18 1983-05-21 Komatsu Denshi Kinzoku Kk Manufacture of semiconductor silicon
JPS58116740A (en) * 1981-12-29 1983-07-12 Fujitsu Ltd Treating method for semiconductor crystal
JPS6184075A (en) * 1984-09-18 1986-04-28 イギリス国 photovoltaic solar cells
JPH01244621A (en) * 1988-03-25 1989-09-29 Shin Etsu Handotai Co Ltd Method of cleaning surface of silicon single crystal substrate
JP2003124220A (en) * 2001-10-10 2003-04-25 Sumitomo Mitsubishi Silicon Corp Method for manufacturing silicon wafer and silicon wafer

Also Published As

Publication number Publication date
JPS6019144B2 (en) 1985-05-14

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