JPS5261973A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5261973A
JPS5261973A JP13852975A JP13852975A JPS5261973A JP S5261973 A JPS5261973 A JP S5261973A JP 13852975 A JP13852975 A JP 13852975A JP 13852975 A JP13852975 A JP 13852975A JP S5261973 A JPS5261973 A JP S5261973A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
film
oxide film
isolating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13852975A
Other languages
English (en)
Inventor
Yoshinori Yukimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13852975A priority Critical patent/JPS5261973A/ja
Publication of JPS5261973A publication Critical patent/JPS5261973A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP13852975A 1975-11-18 1975-11-18 Production of semiconductor device Pending JPS5261973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13852975A JPS5261973A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13852975A JPS5261973A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5261973A true JPS5261973A (en) 1977-05-21

Family

ID=15224273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13852975A Pending JPS5261973A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5261973A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0470074U (ja) * 1990-10-31 1992-06-22

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49122978A (ja) * 1973-03-12 1974-11-25
JPS50137480A (ja) * 1974-04-18 1975-10-31
JPS5240977A (en) * 1975-09-26 1977-03-30 Matsushita Electric Ind Co Ltd Process for production of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49122978A (ja) * 1973-03-12 1974-11-25
JPS50137480A (ja) * 1974-04-18 1975-10-31
JPS5240977A (en) * 1975-09-26 1977-03-30 Matsushita Electric Ind Co Ltd Process for production of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0470074U (ja) * 1990-10-31 1992-06-22

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