JPS5271993A - Production of semiconductor integrated circuit device - Google Patents

Production of semiconductor integrated circuit device

Info

Publication number
JPS5271993A
JPS5271993A JP14795975A JP14795975A JPS5271993A JP S5271993 A JPS5271993 A JP S5271993A JP 14795975 A JP14795975 A JP 14795975A JP 14795975 A JP14795975 A JP 14795975A JP S5271993 A JPS5271993 A JP S5271993A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
circuit device
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14795975A
Other languages
Japanese (ja)
Inventor
Takashi Yamanaka
Shigeru Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14795975A priority Critical patent/JPS5271993A/en
Publication of JPS5271993A publication Critical patent/JPS5271993A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To produce a semiconductor device of high reliability by forming a poly Si layer on the insulating film on an element surface and further forming a metal layer through photo resist then selectively removing the poly Si.
COPYRIGHT: (C)1977,JPO&Japio
JP14795975A 1975-12-11 1975-12-11 Production of semiconductor integrated circuit device Pending JPS5271993A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14795975A JPS5271993A (en) 1975-12-11 1975-12-11 Production of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14795975A JPS5271993A (en) 1975-12-11 1975-12-11 Production of semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5271993A true JPS5271993A (en) 1977-06-15

Family

ID=15441942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14795975A Pending JPS5271993A (en) 1975-12-11 1975-12-11 Production of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5271993A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637648A (en) * 1979-09-04 1981-04-11 Nec Corp Manufacturing of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637648A (en) * 1979-09-04 1981-04-11 Nec Corp Manufacturing of semiconductor device

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