JPS5272189A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5272189A
JPS5272189A JP50148692A JP14869275A JPS5272189A JP S5272189 A JPS5272189 A JP S5272189A JP 50148692 A JP50148692 A JP 50148692A JP 14869275 A JP14869275 A JP 14869275A JP S5272189 A JPS5272189 A JP S5272189A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
burying
flatten
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50148692A
Other languages
Japanese (ja)
Inventor
Kosei Kajiwara
Tatsunori Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50148692A priority Critical patent/JPS5272189A/en
Publication of JPS5272189A publication Critical patent/JPS5272189A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE:To flatten the surface of a semiconductor device such as IC by burying a part or the whole of a surface oxidizing film in the recess provided in the substrate.
JP50148692A 1975-12-12 1975-12-12 Production of semiconductor device Pending JPS5272189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50148692A JPS5272189A (en) 1975-12-12 1975-12-12 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50148692A JPS5272189A (en) 1975-12-12 1975-12-12 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5272189A true JPS5272189A (en) 1977-06-16

Family

ID=15458455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50148692A Pending JPS5272189A (en) 1975-12-12 1975-12-12 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5272189A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575245A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Method of fabricating semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS472519A (en) * 1970-07-10 1972-02-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS472519A (en) * 1970-07-10 1972-02-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575245A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Method of fabricating semiconductor device

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