JPS53108385A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53108385A
JPS53108385A JP2268877A JP2268877A JPS53108385A JP S53108385 A JPS53108385 A JP S53108385A JP 2268877 A JP2268877 A JP 2268877A JP 2268877 A JP2268877 A JP 2268877A JP S53108385 A JPS53108385 A JP S53108385A
Authority
JP
Japan
Prior art keywords
layer
manufacture
semiconductor device
insulating film
gate insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2268877A
Other languages
Japanese (ja)
Inventor
Takamitsu Kamiyama
Hideo Sunami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2268877A priority Critical patent/JPS53108385A/en
Publication of JPS53108385A publication Critical patent/JPS53108385A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent the deterioration in the performance of the second layer gate insulating film due to the contamination of photo resist process, by forming the gate insulating film as the gate electrodes of the first and second layer with the condition covered polycrystal Si layer.
COPYRIGHT: (C)1978,JPO&Japio
JP2268877A 1977-03-04 1977-03-04 Manufacture for semiconductor device Pending JPS53108385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2268877A JPS53108385A (en) 1977-03-04 1977-03-04 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2268877A JPS53108385A (en) 1977-03-04 1977-03-04 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53108385A true JPS53108385A (en) 1978-09-21

Family

ID=12089801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2268877A Pending JPS53108385A (en) 1977-03-04 1977-03-04 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53108385A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575245A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Method of fabricating semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575245A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Method of fabricating semiconductor device

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