JPS53108385A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number: JPS53108385A
Authority: JP; Japan
Prior art keywords: layer; manufacture; semiconductor device; insulating film; gate insulating
Prior art date: 1977-03-04
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP2268877A

Other languages

English (en)

Inventor

Takamitsu Kamiyama

Hideo Sunami

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-03-04

Filing date

1977-03-04

Publication date

1978-09-21

1977-03-04 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1977-03-04 Priority to JP2268877A priority Critical patent/JPS53108385A/ja

1978-09-21 Publication of JPS53108385A publication Critical patent/JPS53108385A/ja

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1
238000011109 contamination Methods 0.000 abstract 1
230000006866 deterioration Effects 0.000 abstract 1
238000000034 method Methods 0.000 abstract 1
229920002120 photoresistant polymer Polymers 0.000 abstract 1

Landscapes

Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Electrodes Of Semiconductors (AREA)

JP2268877A 1977-03-04 1977-03-04 Manufacture for semiconductor device Pending JPS53108385A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2268877A JPS53108385A (en)	1977-03-04	1977-03-04	Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2268877A JPS53108385A (en)	1977-03-04	1977-03-04	Manufacture for semiconductor device

Publications (1)

Publication Number	Publication Date
JPS53108385A true JPS53108385A (en)	1978-09-21

Family

ID=12089801

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2268877A Pending JPS53108385A (en)	1977-03-04	1977-03-04	Manufacture for semiconductor device

Country Status (1)

Country	Link
JP (1)	JPS53108385A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5575245A (en) *	1978-12-04	1980-06-06	Fujitsu Ltd	Method of fabricating semiconductor device

1977
- 1977-03-04 JP JP2268877A patent/JPS53108385A/ja active Pending

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5575245A (en) *	1978-12-04	1980-06-06	Fujitsu Ltd	Method of fabricating semiconductor device

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