JPS5315765A - Vacuum caontact prevention method of hard mask - Google Patents

Vacuum caontact prevention method of hard mask

Info

Publication number
JPS5315765A
JPS5315765A JP8910576A JP8910576A JPS5315765A JP S5315765 A JPS5315765 A JP S5315765A JP 8910576 A JP8910576 A JP 8910576A JP 8910576 A JP8910576 A JP 8910576A JP S5315765 A JPS5315765 A JP S5315765A
Authority
JP
Japan
Prior art keywords
hard mask
vacuum
caontact
prevention method
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8910576A
Other languages
Japanese (ja)
Inventor
Hisao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8910576A priority Critical patent/JPS5315765A/en
Publication of JPS5315765A publication Critical patent/JPS5315765A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To prevent the vacuum contact of a hard mask by providing grooves to the opposing surfaces of a wafer and the hard mask thereby escaping air.
COPYRIGHT: (C)1978,JPO&Japio
JP8910576A 1976-07-28 1976-07-28 Vacuum caontact prevention method of hard mask Pending JPS5315765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8910576A JPS5315765A (en) 1976-07-28 1976-07-28 Vacuum caontact prevention method of hard mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8910576A JPS5315765A (en) 1976-07-28 1976-07-28 Vacuum caontact prevention method of hard mask

Publications (1)

Publication Number Publication Date
JPS5315765A true JPS5315765A (en) 1978-02-14

Family

ID=13961598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8910576A Pending JPS5315765A (en) 1976-07-28 1976-07-28 Vacuum caontact prevention method of hard mask

Country Status (1)

Country Link
JP (1) JPS5315765A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376397A (en) * 1976-12-18 1978-07-06 Agency Of Ind Science & Technol Photo mask for manufacturing magnetic bubble element
JPS63187147U (en) * 1987-05-18 1988-11-30

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376397A (en) * 1976-12-18 1978-07-06 Agency Of Ind Science & Technol Photo mask for manufacturing magnetic bubble element
JPS63187147U (en) * 1987-05-18 1988-11-30

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