JPS549592A - Luminous semiconductor element - Google Patents

Luminous semiconductor element

Info

Publication number
JPS549592A
JPS549592A JP7530777A JP7530777A JPS549592A JP S549592 A JPS549592 A JP S549592A JP 7530777 A JP7530777 A JP 7530777A JP 7530777 A JP7530777 A JP 7530777A JP S549592 A JPS549592 A JP S549592A
Authority
JP
Japan
Prior art keywords
semiconductor element
aperture
providing
type gaas
luminous semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7530777A
Other languages
Japanese (ja)
Other versions
JPS5943836B2 (en
Inventor
Isamu Sakuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP52075307A priority Critical patent/JPS5943836B2/en
Publication of JPS549592A publication Critical patent/JPS549592A/en
Publication of JPS5943836B2 publication Critical patent/JPS5943836B2/en
Expired legal-status Critical Current

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  • Led Devices (AREA)

Abstract

PURPOSE: To constitute a current capillary tube and to form uniform faceluminescence distribution, by providing an aperture to a n-type GaAs substrate by forming a n-type GaAs substrate provided with an aperture into a GaAsGaA As double hetero structure by a liquid phase epitaxial method, and by providing a Zn-diffused layer in a process of the substrate crystal.
COPYRIGHT: (C)1979,JPO&Japio
JP52075307A 1977-06-23 1977-06-23 semiconductor light emitting device Expired JPS5943836B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52075307A JPS5943836B2 (en) 1977-06-23 1977-06-23 semiconductor light emitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52075307A JPS5943836B2 (en) 1977-06-23 1977-06-23 semiconductor light emitting device

Publications (2)

Publication Number Publication Date
JPS549592A true JPS549592A (en) 1979-01-24
JPS5943836B2 JPS5943836B2 (en) 1984-10-24

Family

ID=13572455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52075307A Expired JPS5943836B2 (en) 1977-06-23 1977-06-23 semiconductor light emitting device

Country Status (1)

Country Link
JP (1) JPS5943836B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956780A (en) * 1983-08-31 1984-04-02 Hitachi Ltd Light emitting diode
JPS6294917A (en) * 1985-10-22 1987-05-01 Mitsubishi Electric Corp Apparatus for forming thin film
US4724106A (en) * 1982-03-29 1988-02-09 Futaba Denshi Kogyo Kabushiki Kaisha Process for forming organic film
JPS6411965A (en) * 1987-07-03 1989-01-17 Mitsubishi Electric Corp Thin film forming device
GB2251631A (en) * 1990-12-19 1992-07-15 Mitsubishi Electric Corp Thin-film forming involving ionising vapour clusters
US5211994A (en) * 1991-06-05 1993-05-18 Mitsubishi Denki Kabubshiki Kaisha Apparatus for and method of forming thin film
US5858450A (en) * 1993-12-17 1999-01-12 Canon Kabushiki Kaisha Film forming method and apparatus therefor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101350U (en) * 1984-12-07 1986-06-28
JPS62149727U (en) * 1986-03-14 1987-09-22

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724106A (en) * 1982-03-29 1988-02-09 Futaba Denshi Kogyo Kabushiki Kaisha Process for forming organic film
JPS5956780A (en) * 1983-08-31 1984-04-02 Hitachi Ltd Light emitting diode
JPS6294917A (en) * 1985-10-22 1987-05-01 Mitsubishi Electric Corp Apparatus for forming thin film
JPS6411965A (en) * 1987-07-03 1989-01-17 Mitsubishi Electric Corp Thin film forming device
GB2251631A (en) * 1990-12-19 1992-07-15 Mitsubishi Electric Corp Thin-film forming involving ionising vapour clusters
US5354445A (en) * 1990-12-19 1994-10-11 Mitsubishi Denki Kabushiki Kaisha Thin film-forming apparatus
GB2251631B (en) * 1990-12-19 1994-10-12 Mitsubishi Electric Corp Thin-film forming apparatus
US5211994A (en) * 1991-06-05 1993-05-18 Mitsubishi Denki Kabubshiki Kaisha Apparatus for and method of forming thin film
US5858450A (en) * 1993-12-17 1999-01-12 Canon Kabushiki Kaisha Film forming method and apparatus therefor

Also Published As

Publication number Publication date
JPS5943836B2 (en) 1984-10-24

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