JPS5329088A - Production of semiconductor integrated circuit device - Google Patents

Production of semiconductor integrated circuit device

Info

Publication number
JPS5329088A
JPS5329088A JP10330576A JP10330576A JPS5329088A JP S5329088 A JPS5329088 A JP S5329088A JP 10330576 A JP10330576 A JP 10330576A JP 10330576 A JP10330576 A JP 10330576A JP S5329088 A JPS5329088 A JP S5329088A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
circuit device
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10330576A
Other languages
Japanese (ja)
Inventor
Junji Sugawara
Masanori Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10330576A priority Critical patent/JPS5329088A/en
Publication of JPS5329088A publication Critical patent/JPS5329088A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To obtain multilayer wirings free from any disconnection by stepping by providing a protecting film having erosion resistance to the etching solution used for forming patterns to wiring layers, on an insulator layer and forming wiring papatterns on said film.
COPYRIGHT: (C)1978,JPO&Japio
JP10330576A 1976-08-30 1976-08-30 Production of semiconductor integrated circuit device Pending JPS5329088A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10330576A JPS5329088A (en) 1976-08-30 1976-08-30 Production of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10330576A JPS5329088A (en) 1976-08-30 1976-08-30 Production of semiconductor integrated circuit device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP58071214A Division JPS58194356A (en) 1983-04-22 1983-04-22 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5329088A true JPS5329088A (en) 1978-03-17

Family

ID=14350507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10330576A Pending JPS5329088A (en) 1976-08-30 1976-08-30 Production of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5329088A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4994402A (en) * 1987-06-26 1991-02-19 Hewlett-Packard Company Method of fabricating a coplanar, self-aligned contact structure in a semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50137086A (en) * 1974-04-17 1975-10-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50137086A (en) * 1974-04-17 1975-10-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4994402A (en) * 1987-06-26 1991-02-19 Hewlett-Packard Company Method of fabricating a coplanar, self-aligned contact structure in a semiconductor device

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