JPS533169A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS533169A
JPS533169A JP7751176A JP7751176A JPS533169A JP S533169 A JPS533169 A JP S533169A JP 7751176 A JP7751176 A JP 7751176A JP 7751176 A JP7751176 A JP 7751176A JP S533169 A JPS533169 A JP S533169A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
mesa
openings
directin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7751176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5716737B2 (2
Inventor
Kaoru Isono
Mikio Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP7751176A priority Critical patent/JPS533169A/ja
Publication of JPS533169A publication Critical patent/JPS533169A/ja
Publication of JPS5716737B2 publication Critical patent/JPS5716737B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP7751176A 1976-06-30 1976-06-30 Production of semiconductor device Granted JPS533169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7751176A JPS533169A (en) 1976-06-30 1976-06-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7751176A JPS533169A (en) 1976-06-30 1976-06-30 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS533169A true JPS533169A (en) 1978-01-12
JPS5716737B2 JPS5716737B2 (2) 1982-04-07

Family

ID=13635981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7751176A Granted JPS533169A (en) 1976-06-30 1976-06-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS533169A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61184744U (2) * 1985-05-08 1986-11-18
JP2014067773A (ja) * 2012-09-25 2014-04-17 Canon Inc シリコン基板のエッチング方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61184744U (2) * 1985-05-08 1986-11-18
JP2014067773A (ja) * 2012-09-25 2014-04-17 Canon Inc シリコン基板のエッチング方法

Also Published As

Publication number Publication date
JPS5716737B2 (2) 1982-04-07

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