JPS5366180A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5366180A
JPS5366180A JP14121376A JP14121376A JPS5366180A JP S5366180 A JPS5366180 A JP S5366180A JP 14121376 A JP14121376 A JP 14121376A JP 14121376 A JP14121376 A JP 14121376A JP S5366180 A JPS5366180 A JP S5366180A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
gate electrode
overetching
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14121376A
Other languages
Japanese (ja)
Inventor
Hiroshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14121376A priority Critical patent/JPS5366180A/en
Publication of JPS5366180A publication Critical patent/JPS5366180A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To reduce the leakage between the gate electrode and the source and drain by covering the gate electrode with photoresist after its formation, and exposing the resist to HF in a vacuum to etch only the desired oxide film without overetching.
COPYRIGHT: (C)1978,JPO&Japio
JP14121376A 1976-11-26 1976-11-26 Production of semiconductor device Pending JPS5366180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14121376A JPS5366180A (en) 1976-11-26 1976-11-26 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14121376A JPS5366180A (en) 1976-11-26 1976-11-26 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5366180A true JPS5366180A (en) 1978-06-13

Family

ID=15286761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14121376A Pending JPS5366180A (en) 1976-11-26 1976-11-26 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5366180A (en)

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