JPS54111758A - Heat treatment unit and boat pick up method from heat treatment unit - Google Patents

Heat treatment unit and boat pick up method from heat treatment unit

Info

Publication number
JPS54111758A
JPS54111758A JP1844878A JP1844878A JPS54111758A JP S54111758 A JPS54111758 A JP S54111758A JP 1844878 A JP1844878 A JP 1844878A JP 1844878 A JP1844878 A JP 1844878A JP S54111758 A JPS54111758 A JP S54111758A
Authority
JP
Japan
Prior art keywords
boat
heat treatment
core tube
treatment unit
pick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1844878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627687B2 (fr
Inventor
Tamotsu Sasaki
Hiroshi Muto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1844878A priority Critical patent/JPS54111758A/ja
Publication of JPS54111758A publication Critical patent/JPS54111758A/ja
Publication of JPS627687B2 publication Critical patent/JPS627687B2/ja
Granted legal-status Critical Current

Links

JP1844878A 1978-02-22 1978-02-22 Heat treatment unit and boat pick up method from heat treatment unit Granted JPS54111758A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1844878A JPS54111758A (en) 1978-02-22 1978-02-22 Heat treatment unit and boat pick up method from heat treatment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1844878A JPS54111758A (en) 1978-02-22 1978-02-22 Heat treatment unit and boat pick up method from heat treatment unit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59137159A Division JPS6063925A (ja) 1984-07-04 1984-07-04 ウエハ取扱い方法

Publications (2)

Publication Number Publication Date
JPS54111758A true JPS54111758A (en) 1979-09-01
JPS627687B2 JPS627687B2 (fr) 1987-02-18

Family

ID=11971897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1844878A Granted JPS54111758A (en) 1978-02-22 1978-02-22 Heat treatment unit and boat pick up method from heat treatment unit

Country Status (1)

Country Link
JP (1) JPS54111758A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970343U (ja) * 1982-11-02 1984-05-12 株式会社日立国際電気 ソフトランデイング装置
JPS6190247U (fr) * 1984-11-17 1986-06-12

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139378A (en) * 1976-05-17 1977-11-21 Hitachi Ltd Integrated treatment apparatus for semiconductor wafers
JPS52154343A (en) * 1976-06-17 1977-12-22 Matsushita Electric Ind Co Ltd Production of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139378A (en) * 1976-05-17 1977-11-21 Hitachi Ltd Integrated treatment apparatus for semiconductor wafers
JPS52154343A (en) * 1976-06-17 1977-12-22 Matsushita Electric Ind Co Ltd Production of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970343U (ja) * 1982-11-02 1984-05-12 株式会社日立国際電気 ソフトランデイング装置
JPS6190247U (fr) * 1984-11-17 1986-06-12

Also Published As

Publication number Publication date
JPS627687B2 (fr) 1987-02-18

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