JPS542674A - Containing jig for semiconductor wafer - Google Patents

Containing jig for semiconductor wafer

Info

Publication number
JPS542674A
JPS542674A JP6828377A JP6828377A JPS542674A JP S542674 A JPS542674 A JP S542674A JP 6828377 A JP6828377 A JP 6828377A JP 6828377 A JP6828377 A JP 6828377A JP S542674 A JPS542674 A JP S542674A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer
containing jig
jig
insersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6828377A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6828377A priority Critical patent/JPS542674A/en
Publication of JPS542674A publication Critical patent/JPS542674A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To array wafers in a short time easily and flatly without damaging them, by providing an insersion part, whose diameter is slightly greater than the outside diameter of a rotary shaft which pushes up and rotates a wafer from the lower part of the wafer, to a bar support body.
COPYRIGHT: (C)1979,JPO&Japio
JP6828377A 1977-06-08 1977-06-08 Containing jig for semiconductor wafer Pending JPS542674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6828377A JPS542674A (en) 1977-06-08 1977-06-08 Containing jig for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6828377A JPS542674A (en) 1977-06-08 1977-06-08 Containing jig for semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS542674A true JPS542674A (en) 1979-01-10

Family

ID=13369271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6828377A Pending JPS542674A (en) 1977-06-08 1977-06-08 Containing jig for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS542674A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56501443A (en) * 1979-05-23 1981-10-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56501443A (en) * 1979-05-23 1981-10-08

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