JPS5432985A - Flattening method for substrate surface with protrusion - Google Patents

Flattening method for substrate surface with protrusion

Info

Publication number
JPS5432985A
JPS5432985A JP9976177A JP9976177A JPS5432985A JP S5432985 A JPS5432985 A JP S5432985A JP 9976177 A JP9976177 A JP 9976177A JP 9976177 A JP9976177 A JP 9976177A JP S5432985 A JPS5432985 A JP S5432985A
Authority
JP
Japan
Prior art keywords
protrusion
substrate surface
flattening method
ion
flattening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9976177A
Other languages
Japanese (ja)
Inventor
Shigeji Kinoshita
Kazushi Nagata
Masahiko Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9976177A priority Critical patent/JPS5432985A/en
Publication of JPS5432985A publication Critical patent/JPS5432985A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To flaten a pellet surface by utilizing that an etching speed at the time of ion etching depends upon an ion-beam incident angle.
COPYRIGHT: (C)1979,JPO&Japio
JP9976177A 1977-08-19 1977-08-19 Flattening method for substrate surface with protrusion Pending JPS5432985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9976177A JPS5432985A (en) 1977-08-19 1977-08-19 Flattening method for substrate surface with protrusion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9976177A JPS5432985A (en) 1977-08-19 1977-08-19 Flattening method for substrate surface with protrusion

Publications (1)

Publication Number Publication Date
JPS5432985A true JPS5432985A (en) 1979-03-10

Family

ID=14255950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9976177A Pending JPS5432985A (en) 1977-08-19 1977-08-19 Flattening method for substrate surface with protrusion

Country Status (1)

Country Link
JP (1) JPS5432985A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55143035A (en) * 1979-04-24 1980-11-08 Nec Corp Manufacture of pattern
JPS5750436A (en) * 1980-09-12 1982-03-24 Fujitsu Ltd Manufacture of semiconductor device
JPS61289635A (en) * 1985-06-17 1986-12-19 Nippon Telegr & Teleph Corp <Ntt> Surface flatterning
JPS62289252A (en) * 1986-05-09 1987-12-16 エルンスト−アウグスト、ビ−レフエルト Scroll chamber separator
JPH10135320A (en) * 1996-10-24 1998-05-22 Lg Semicon Co Ltd Method for forming separation layer of semiconductor device
US6952867B2 (en) 2000-12-26 2005-10-11 Alps Electric Co., Ltd. Method for manufacturing perpendicular magnetic recording head having inverted trapezoidal main magnetic pole layer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55143035A (en) * 1979-04-24 1980-11-08 Nec Corp Manufacture of pattern
JPS5750436A (en) * 1980-09-12 1982-03-24 Fujitsu Ltd Manufacture of semiconductor device
JPS61289635A (en) * 1985-06-17 1986-12-19 Nippon Telegr & Teleph Corp <Ntt> Surface flatterning
JPS62289252A (en) * 1986-05-09 1987-12-16 エルンスト−アウグスト、ビ−レフエルト Scroll chamber separator
JPH10135320A (en) * 1996-10-24 1998-05-22 Lg Semicon Co Ltd Method for forming separation layer of semiconductor device
US6952867B2 (en) 2000-12-26 2005-10-11 Alps Electric Co., Ltd. Method for manufacturing perpendicular magnetic recording head having inverted trapezoidal main magnetic pole layer

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