JPS5436595A - Preparation of bubble memory chip - Google Patents
Preparation of bubble memory chipInfo
- Publication number
- JPS5436595A JPS5436595A JP10153777A JP10153777A JPS5436595A JP S5436595 A JPS5436595 A JP S5436595A JP 10153777 A JP10153777 A JP 10153777A JP 10153777 A JP10153777 A JP 10153777A JP S5436595 A JPS5436595 A JP S5436595A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- memory chip
- bubble memory
- conductive layer
- intermediste
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thin Magnetic Films (AREA)
Abstract
PURPOSE: To enhance the quality and the productivity by using a plasma etching in order to connect a first conductive layer with a second metal conductive layer installin a through-hole which penetrates an intermediste insulating layer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10153777A JPS5816552B2 (en) | 1977-08-26 | 1977-08-26 | Bubble memory chip manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10153777A JPS5816552B2 (en) | 1977-08-26 | 1977-08-26 | Bubble memory chip manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5436595A true JPS5436595A (en) | 1979-03-17 |
| JPS5816552B2 JPS5816552B2 (en) | 1983-03-31 |
Family
ID=14303178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10153777A Expired JPS5816552B2 (en) | 1977-08-26 | 1977-08-26 | Bubble memory chip manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5816552B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5740792A (en) * | 1981-06-24 | 1982-03-06 | Hitachi Ltd | Magnetic bubble memory element |
| JPS57203285A (en) * | 1981-06-10 | 1982-12-13 | Nec Corp | Magnetic bubble storage device |
| JPS5832291A (en) * | 1981-08-20 | 1983-02-25 | Nec Corp | Magnetic bubble storage device |
| JPS60110328A (en) * | 1983-11-17 | 1985-06-15 | Toyo Eng Corp | Catalytic reaction device |
| JPS6116091A (en) * | 1984-07-02 | 1986-01-24 | Fujitsu Ltd | Magnetic bubble memory element |
-
1977
- 1977-08-26 JP JP10153777A patent/JPS5816552B2/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57203285A (en) * | 1981-06-10 | 1982-12-13 | Nec Corp | Magnetic bubble storage device |
| JPS5740792A (en) * | 1981-06-24 | 1982-03-06 | Hitachi Ltd | Magnetic bubble memory element |
| JPS5832291A (en) * | 1981-08-20 | 1983-02-25 | Nec Corp | Magnetic bubble storage device |
| JPS60110328A (en) * | 1983-11-17 | 1985-06-15 | Toyo Eng Corp | Catalytic reaction device |
| JPS6116091A (en) * | 1984-07-02 | 1986-01-24 | Fujitsu Ltd | Magnetic bubble memory element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5816552B2 (en) | 1983-03-31 |
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