JPS5440077A - Manufacture of semiconductor integrated circuit device substrate - Google Patents

Manufacture of semiconductor integrated circuit device substrate

Info

Publication number
JPS5440077A
JPS5440077A JP10700477A JP10700477A JPS5440077A JP S5440077 A JPS5440077 A JP S5440077A JP 10700477 A JP10700477 A JP 10700477A JP 10700477 A JP10700477 A JP 10700477A JP S5440077 A JPS5440077 A JP S5440077A
Authority
JP
Japan
Prior art keywords
manufacture
integrated circuit
semiconductor integrated
circuit device
device substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10700477A
Other languages
English (en)
Inventor
Toshio Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10700477A priority Critical patent/JPS5440077A/ja
Publication of JPS5440077A publication Critical patent/JPS5440077A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10700477A 1977-09-05 1977-09-05 Manufacture of semiconductor integrated circuit device substrate Pending JPS5440077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10700477A JPS5440077A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor integrated circuit device substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10700477A JPS5440077A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor integrated circuit device substrate

Publications (1)

Publication Number Publication Date
JPS5440077A true JPS5440077A (en) 1979-03-28

Family

ID=14448040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10700477A Pending JPS5440077A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor integrated circuit device substrate

Country Status (1)

Country Link
JP (1) JPS5440077A (ja)

Similar Documents

Publication Publication Date Title
JPS5269587A (en) Device and manufacture for high voltage resisting semiconductor
JPS53108390A (en) Semiconductor device and its manufacture
JPS5252582A (en) Device and production for semiconductor
JPS52156580A (en) Semiconductor integrated circuit device and its production
JPS5331964A (en) Production of semiconductor substrates
JPS5333590A (en) Production of substrate for semiconductor integrated circuit
JPS5440077A (en) Manufacture of semiconductor integrated circuit device substrate
JPS5763842A (en) Preparation of semiconductor integrated circuit
JPS54117680A (en) Semiconductor device
JPS5317068A (en) Semiconductor device and its production
JPS5380183A (en) Semiconductor device
JPS5368165A (en) Production of semiconductor device
JPS5268388A (en) Semiconductor integrated circuit
JPS534469A (en) Semiconductor device
JPS52119084A (en) Manufacture of semiconductor integrated circuit
JPS53148992A (en) Manufacture of semiconductor device
JPS5317286A (en) Production of semiconductor device
JPS547867A (en) Manufacture for semiconductor device
JPS546775A (en) Semiconductor device featuring stepped electrode structure
JPS5243369A (en) Flat etching method for silicon
JPS5355991A (en) Manufacture of dielectric separation substrate
JPS5428580A (en) Manufacture of semiconductor device
JPS5324287A (en) Production of semiconductor element
JPS5365676A (en) Manufacture of integrated semiconductor device
JPS5421261A (en) Manufacture for semiconductor device