JPS5440077A - Manufacture of semiconductor integrated circuit device substrate - Google Patents
Manufacture of semiconductor integrated circuit device substrateInfo
- Publication number
- JPS5440077A JPS5440077A JP10700477A JP10700477A JPS5440077A JP S5440077 A JPS5440077 A JP S5440077A JP 10700477 A JP10700477 A JP 10700477A JP 10700477 A JP10700477 A JP 10700477A JP S5440077 A JPS5440077 A JP S5440077A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- integrated circuit
- semiconductor integrated
- circuit device
- device substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10700477A JPS5440077A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor integrated circuit device substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10700477A JPS5440077A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor integrated circuit device substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5440077A true JPS5440077A (en) | 1979-03-28 |
Family
ID=14448040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10700477A Pending JPS5440077A (en) | 1977-09-05 | 1977-09-05 | Manufacture of semiconductor integrated circuit device substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5440077A (ja) |
-
1977
- 1977-09-05 JP JP10700477A patent/JPS5440077A/ja active Pending
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