JPS52114268A - Selective liquid growing method - Google Patents

Selective liquid growing method

Info

Publication number
JPS52114268A
JPS52114268A JP2993076A JP2993076A JPS52114268A JP S52114268 A JPS52114268 A JP S52114268A JP 2993076 A JP2993076 A JP 2993076A JP 2993076 A JP2993076 A JP 2993076A JP S52114268 A JPS52114268 A JP S52114268A
Authority
JP
Japan
Prior art keywords
growing method
selective liquid
liquid growing
selectively
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2993076A
Other languages
Japanese (ja)
Inventor
Konen Doi
Susumu Takahashi
Motonao Hirao
Hiroshi Kodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2993076A priority Critical patent/JPS52114268A/en
Publication of JPS52114268A publication Critical patent/JPS52114268A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To obtain a flat selectively-liquid-grown layer by beforehand depositing a material used for growing of an amount just slightly smaller than the dissolving amount of a solvent at a growth starting temperature, aon a substrate and performing epitaxial growth selectively.
COPYRIGHT: (C)1977,JPO&Japio
JP2993076A 1976-03-22 1976-03-22 Selective liquid growing method Pending JPS52114268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2993076A JPS52114268A (en) 1976-03-22 1976-03-22 Selective liquid growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2993076A JPS52114268A (en) 1976-03-22 1976-03-22 Selective liquid growing method

Publications (1)

Publication Number Publication Date
JPS52114268A true JPS52114268A (en) 1977-09-24

Family

ID=12289697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2993076A Pending JPS52114268A (en) 1976-03-22 1976-03-22 Selective liquid growing method

Country Status (1)

Country Link
JP (1) JPS52114268A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184229A (en) * 1981-05-08 1982-11-12 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184229A (en) * 1981-05-08 1982-11-12 Fujitsu Ltd Manufacture of semiconductor device

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