JPS55108732A - Manufacture of ohmic electrode - Google Patents

Manufacture of ohmic electrode

Info

Publication number: JPS55108732A
Authority: JP; Japan
Prior art keywords: heat treatment; inp; reaction compound; evaporation; coated
Prior art date: 1979-02-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP1665579A

Other languages

English (en)

Japanese (ja)

Other versions

JPS6138849B2 (2

Inventor

Masaki Ogawa

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NEC Corp

Original Assignee

NEC Corp

Nippon Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1979-02-14

Filing date

1979-02-14

Publication date

1980-08-21

1979-02-14 Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp

1979-02-14 Priority to JP1665579A priority Critical patent/JPS55108732A/ja

1980-08-21 Publication of JPS55108732A publication Critical patent/JPS55108732A/ja

1986-09-01 Publication of JPS6138849B2 publication Critical patent/JPS6138849B2/ja

Status Granted legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title 1
150000001875 compounds Chemical class 0.000 abstract 4
238000006243 chemical reaction Methods 0.000 abstract 3
238000010438 heat treatment Methods 0.000 abstract 3
229910052738 indium Inorganic materials 0.000 abstract 3
230000008020 evaporation Effects 0.000 abstract 2
238000001704 evaporation Methods 0.000 abstract 2
229910052751 metal Inorganic materials 0.000 abstract 2
239000002184 metal Substances 0.000 abstract 2
239000000758 substrate Substances 0.000 abstract 2
229910001297 Zn alloy Inorganic materials 0.000 abstract 1
229910052785 arsenic Inorganic materials 0.000 abstract 1
RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract 1
238000000354 decomposition reaction Methods 0.000 abstract 1
238000010494 dissociation reaction Methods 0.000 abstract 1
230000005593 dissociations Effects 0.000 abstract 1
229910052737 gold Inorganic materials 0.000 abstract 1
238000000034 method Methods 0.000 abstract 1
229910052698 phosphorus Inorganic materials 0.000 abstract 1
239000004065 semiconductor Substances 0.000 abstract 1
229910052709 silver Inorganic materials 0.000 abstract 1
229910052725 zinc Inorganic materials 0.000 abstract 1

Landscapes

Electrodes Of Semiconductors (AREA)

JP1665579A 1979-02-14 1979-02-14 Manufacture of ohmic electrode Granted JPS55108732A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1665579A JPS55108732A (en)	1979-02-14	1979-02-14	Manufacture of ohmic electrode

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1665579A JPS55108732A (en)	1979-02-14	1979-02-14	Manufacture of ohmic electrode

Publications (2)

Publication Number	Publication Date
JPS55108732A true JPS55108732A (en)	1980-08-21
JPS6138849B2 JPS6138849B2 (2)	1986-09-01

Family

ID=11922349

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1665579A Granted JPS55108732A (en)	1979-02-14	1979-02-14	Manufacture of ohmic electrode

Country Status (1)

Country	Link
JP (1)	JPS55108732A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62252134A (ja) *	1986-04-24	1987-11-02	Matsushita Electric Ind Co Ltd	化合物半導体装置の製造方法
JPH01307278A (ja) *	1988-06-04	1989-12-12	Nippon Mining Co Ltd	太陽電池

1979
- 1979-02-14 JP JP1665579A patent/JPS55108732A/ja active Granted

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62252134A (ja) *	1986-04-24	1987-11-02	Matsushita Electric Ind Co Ltd	化合物半導体装置の製造方法
JPH01307278A (ja) *	1988-06-04	1989-12-12	Nippon Mining Co Ltd	太陽電池

Also Published As

Publication number	Publication date
JPS6138849B2 (2)	1986-09-01

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