JPS5541724A - Marker - Google Patents

Marker

Info

Publication number
JPS5541724A
JPS5541724A JP11433478A JP11433478A JPS5541724A JP S5541724 A JPS5541724 A JP S5541724A JP 11433478 A JP11433478 A JP 11433478A JP 11433478 A JP11433478 A JP 11433478A JP S5541724 A JPS5541724 A JP S5541724A
Authority
JP
Japan
Prior art keywords
film
tungsten film
markers
proper
marker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11433478A
Other languages
Japanese (ja)
Inventor
Tadahiro Takigawa
Yoshihide Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11433478A priority Critical patent/JPS5541724A/en
Publication of JPS5541724A publication Critical patent/JPS5541724A/en
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To obtain mark information constantly with stability by a marker by providing heat cleaning functions to the base of the marker proper.
CONSTITUTION: An exothermic member, for example, a tungsten film 2 is formed on an insulating base plate 1. Overlying the tungsten film 2, an SiO2 film 3, chromium film 4 and a gold film 5 are alternately formed in lamination, with the film 5 on top, on which markers proper 6 are provided, while a heating source 7 is connected to the tungsten film 2 and between the tungsten film 2 and the gold film 5. With this arrangement, the heating source 7 is turned "on" when the surfaces of the markers 6 have become stained to some extent becase of adsorption thereto of organic particles, so that the tungsten film 2 draws heating current to cause its area to be exothermic, while the markers proper 6 become heated, resulting consequently in causing the organic particles to be dissolved and evaporated away from the surfaces. Thus, mark information is available constantly with stability and also the accuracy of pattern drawing can be improved by virtue of this device.
COPYRIGHT: (C)1980,JPO&Japio
JP11433478A 1978-09-18 1978-09-18 Marker Pending JPS5541724A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11433478A JPS5541724A (en) 1978-09-18 1978-09-18 Marker

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11433478A JPS5541724A (en) 1978-09-18 1978-09-18 Marker

Publications (1)

Publication Number Publication Date
JPS5541724A true JPS5541724A (en) 1980-03-24

Family

ID=14635189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11433478A Pending JPS5541724A (en) 1978-09-18 1978-09-18 Marker

Country Status (1)

Country Link
JP (1) JPS5541724A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196296A (en) * 2000-01-13 2001-07-19 Advantest Corp Charged particle beam exposure system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196296A (en) * 2000-01-13 2001-07-19 Advantest Corp Charged particle beam exposure system

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