JPS5542013A - Automatic appearance test system - Google Patents

Automatic appearance test system

Info

Publication number
JPS5542013A
JPS5542013A JP11464378A JP11464378A JPS5542013A JP S5542013 A JPS5542013 A JP S5542013A JP 11464378 A JP11464378 A JP 11464378A JP 11464378 A JP11464378 A JP 11464378A JP S5542013 A JPS5542013 A JP S5542013A
Authority
JP
Japan
Prior art keywords
data
standard pattern
area
test
band
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11464378A
Other languages
Japanese (ja)
Inventor
Toshimitsu Hamada
Kazuhiko Eguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11464378A priority Critical patent/JPS5542013A/en
Publication of JPS5542013A publication Critical patent/JPS5542013A/en
Pending legal-status Critical Current

Links

Landscapes

  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)

Abstract

PURPOSE: To make it possible to automatically change test area of an object in such a way that control data for whole object and variety distinction data stored in memory device which has stored data for generating standard pattern are selected therefrom by selector circuit.
CONSTITUTION: Object image signal derived from photographing device 9 and standard pattern from standard pattern generator 7 are compared by discriminator circuit 10, as standard pattern is generated synchronously to scanning operation for X-Y stage. Stored in memory 5 are 4 data comprising test area designation data, band-like area designation data, standard pattern generating data, and data indicating terminal of data, and information which insicates attribute of each data. The standard pattern generating data is transferred to pattern generating section 7 for each band-like area separately, and system controlling data from memory 5 is transferred to system control section 8 at each time when test is started and when scanning operation for band-like area is terminated. Therefore, change of scanning area for each test can be facilitated, and control thereof can be automized.
COPYRIGHT: (C)1980,JPO&Japio
JP11464378A 1978-09-20 1978-09-20 Automatic appearance test system Pending JPS5542013A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11464378A JPS5542013A (en) 1978-09-20 1978-09-20 Automatic appearance test system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11464378A JPS5542013A (en) 1978-09-20 1978-09-20 Automatic appearance test system

Publications (1)

Publication Number Publication Date
JPS5542013A true JPS5542013A (en) 1980-03-25

Family

ID=14642928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11464378A Pending JPS5542013A (en) 1978-09-20 1978-09-20 Automatic appearance test system

Country Status (1)

Country Link
JP (1) JPS5542013A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827323A (en) * 1981-08-12 1983-02-18 Hitachi Ltd Mask inspection method and device
JPS58192342A (en) * 1982-05-07 1983-11-09 Hitachi Ltd Inspecting method of pattern
JPS60138924A (en) * 1983-12-27 1985-07-23 Fujitsu Ltd Pattern inspection method and device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827323A (en) * 1981-08-12 1983-02-18 Hitachi Ltd Mask inspection method and device
JPS58192342A (en) * 1982-05-07 1983-11-09 Hitachi Ltd Inspecting method of pattern
JPS60138924A (en) * 1983-12-27 1985-07-23 Fujitsu Ltd Pattern inspection method and device

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