JPS5542013A - Automatic appearance test system - Google Patents

Automatic appearance test system

Info

Publication number
JPS5542013A
JPS5542013A JP11464378A JP11464378A JPS5542013A JP S5542013 A JPS5542013 A JP S5542013A JP 11464378 A JP11464378 A JP 11464378A JP 11464378 A JP11464378 A JP 11464378A JP S5542013 A JPS5542013 A JP S5542013A
Authority
JP
Japan
Prior art keywords
data
standard pattern
area
test
band
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11464378A
Other languages
English (en)
Inventor
Toshimitsu Hamada
Kazuhiko Eguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11464378A priority Critical patent/JPS5542013A/ja
Publication of JPS5542013A publication Critical patent/JPS5542013A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11464378A 1978-09-20 1978-09-20 Automatic appearance test system Pending JPS5542013A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11464378A JPS5542013A (en) 1978-09-20 1978-09-20 Automatic appearance test system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11464378A JPS5542013A (en) 1978-09-20 1978-09-20 Automatic appearance test system

Publications (1)

Publication Number Publication Date
JPS5542013A true JPS5542013A (en) 1980-03-25

Family

ID=14642928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11464378A Pending JPS5542013A (en) 1978-09-20 1978-09-20 Automatic appearance test system

Country Status (1)

Country Link
JP (1) JPS5542013A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827323A (ja) * 1981-08-12 1983-02-18 Hitachi Ltd マスク検査方法および装置
JPS58192342A (ja) * 1982-05-07 1983-11-09 Hitachi Ltd パターンの検査方法及び装置
JPS60138924A (ja) * 1983-12-27 1985-07-23 Fujitsu Ltd パタ−ン検査方法及びその装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827323A (ja) * 1981-08-12 1983-02-18 Hitachi Ltd マスク検査方法および装置
JPS58192342A (ja) * 1982-05-07 1983-11-09 Hitachi Ltd パターンの検査方法及び装置
JPS60138924A (ja) * 1983-12-27 1985-07-23 Fujitsu Ltd パタ−ン検査方法及びその装置

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