JPS5546753A - Pattern formation method using photosensitive chalcogenide layer - Google Patents

Pattern formation method using photosensitive chalcogenide layer

Info

Publication number
JPS5546753A
JPS5546753A JP9615079A JP9615079A JPS5546753A JP S5546753 A JPS5546753 A JP S5546753A JP 9615079 A JP9615079 A JP 9615079A JP 9615079 A JP9615079 A JP 9615079A JP S5546753 A JPS5546753 A JP S5546753A
Authority
JP
Japan
Prior art keywords
layer
region
silver
chalcogenide layer
formation method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9615079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5723255B2 (cs
Inventor
Akira Yoshikawa
Haruo Nagai
Osamu Ochi
Kazuko Nakano
Yoshihiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9615079A priority Critical patent/JPS5546753A/ja
Publication of JPS5546753A publication Critical patent/JPS5546753A/ja
Publication of JPS5723255B2 publication Critical patent/JPS5723255B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/705—Compositions containing chalcogenides, metals or alloys thereof, as photosensitive substances, e.g. photodope systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP9615079A 1979-07-30 1979-07-30 Pattern formation method using photosensitive chalcogenide layer Granted JPS5546753A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9615079A JPS5546753A (en) 1979-07-30 1979-07-30 Pattern formation method using photosensitive chalcogenide layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9615079A JPS5546753A (en) 1979-07-30 1979-07-30 Pattern formation method using photosensitive chalcogenide layer

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP51066879A Division JPS5934295B2 (ja) 1976-06-08 1976-06-08 感光性カルコゲナイド層を有するパタ−ン形成用感光性材及びその製法及び感光性カルコゲナイド層を使用したパタ−ン形成用光学マスク及びパタ−ン形成法

Publications (2)

Publication Number Publication Date
JPS5546753A true JPS5546753A (en) 1980-04-02
JPS5723255B2 JPS5723255B2 (cs) 1982-05-18

Family

ID=14157341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9615079A Granted JPS5546753A (en) 1979-07-30 1979-07-30 Pattern formation method using photosensitive chalcogenide layer

Country Status (1)

Country Link
JP (1) JPS5546753A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04348783A (ja) * 1991-05-28 1992-12-03 Kayaba Ind Co Ltd 動揺機構

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910018A (cs) * 1972-05-23 1974-01-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910018A (cs) * 1972-05-23 1974-01-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04348783A (ja) * 1991-05-28 1992-12-03 Kayaba Ind Co Ltd 動揺機構

Also Published As

Publication number Publication date
JPS5723255B2 (cs) 1982-05-18

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