JPS5563876A - Field-effect semiconductor device - Google Patents
Field-effect semiconductor deviceInfo
- Publication number
- JPS5563876A JPS5563876A JP13771878A JP13771878A JPS5563876A JP S5563876 A JPS5563876 A JP S5563876A JP 13771878 A JP13771878 A JP 13771878A JP 13771878 A JP13771878 A JP 13771878A JP S5563876 A JPS5563876 A JP S5563876A
- Authority
- JP
- Japan
- Prior art keywords
- region
- oxide film
- type
- gate
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To attain a high dielectric strength and a low threshold voltage for a double-diffused field-effect transistor with an insulated gate, by selectively introducing an impurity through a surface to displace the surface of a pn-junction from the vicinity of the former surface. CONSTITUTION:When a P-type silicon substrate is used, an oxide film 12 is selectively provided on the surface of the substrate 10. The oxide film 12 is used as a mask to firstly produce an N-type semiconductor region 14 and secondly produce a P<+> semiconductor region 15 of smaller depth than a region 2. The oxide film 12 is removed from the part of the region 14, which finally becomes a gate. A gate insulating layer 16 of prescribed thickness is produced on the film-removed part of the region 14. A P-type impurity is introduced at a low concentration through the insulating layer 16 by ion implantation to provide a P-type region 11c'. Since the part 11c' projecting toward the source region 15 is provided on the surface of the region 14, a depletion layer extends on the total area of the part 11c'. The dielectric strength is thus raised.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13771878A JPS5563876A (en) | 1978-11-08 | 1978-11-08 | Field-effect semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13771878A JPS5563876A (en) | 1978-11-08 | 1978-11-08 | Field-effect semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5563876A true JPS5563876A (en) | 1980-05-14 |
Family
ID=15205191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13771878A Pending JPS5563876A (en) | 1978-11-08 | 1978-11-08 | Field-effect semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5563876A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62104068A (en) * | 1985-10-30 | 1987-05-14 | Mitsubishi Electric Corp | Semiconductor integrated circuit device |
| JPS63173372A (en) * | 1987-01-13 | 1988-07-16 | Nissan Motor Co Ltd | Vertical mos transistor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5374385A (en) * | 1976-12-15 | 1978-07-01 | Hitachi Ltd | Manufacture of field effect semiconductor device |
-
1978
- 1978-11-08 JP JP13771878A patent/JPS5563876A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5374385A (en) * | 1976-12-15 | 1978-07-01 | Hitachi Ltd | Manufacture of field effect semiconductor device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62104068A (en) * | 1985-10-30 | 1987-05-14 | Mitsubishi Electric Corp | Semiconductor integrated circuit device |
| JPS63173372A (en) * | 1987-01-13 | 1988-07-16 | Nissan Motor Co Ltd | Vertical mos transistor |
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