JPS5593230A - Soldering method for semiconductor device - Google Patents
Soldering method for semiconductor deviceInfo
- Publication number
- JPS5593230A JPS5593230A JP150779A JP150779A JPS5593230A JP S5593230 A JPS5593230 A JP S5593230A JP 150779 A JP150779 A JP 150779A JP 150779 A JP150779 A JP 150779A JP S5593230 A JPS5593230 A JP S5593230A
- Authority
- JP
- Japan
- Prior art keywords
- solder
- network
- thickness
- sink
- pellet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
Landscapes
- Die Bonding (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
PURPOSE: To make the solder thickness even by a method wherein when soldering a silicon pellet and a heat sink, a solder containing the low wire expansion coefficient metallic network is placed between the silicon pellet and the sink, and only the solder is melted, cooled and hardened.
CONSTITUTION: The silicon peller 1 is fixed to the heat sink by means of solder. Plurality of metallic network 3 such as tungsten are inserted in the solder to be used at this time, the solder is melted and dispersed into meshes of the network 3 to become the soldering part 4. In this constitution, the thickness of solder is made 30W100μm and the wire diameter of the network 3 is made 10W30μm. Furthermore, gold with high wire expansion coefficient is not suitable for the wire material to be used, but tungsten or molybdenum is desirable. In this way, the heat coefficient difference between the pellet 1 and the sink 2 is eased and the junction 4 thickness is made even.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP150779A JPS5593230A (en) | 1979-01-10 | 1979-01-10 | Soldering method for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP150779A JPS5593230A (en) | 1979-01-10 | 1979-01-10 | Soldering method for semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5593230A true JPS5593230A (en) | 1980-07-15 |
Family
ID=11503384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP150779A Pending JPS5593230A (en) | 1979-01-10 | 1979-01-10 | Soldering method for semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5593230A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63104778A (en) * | 1986-10-21 | 1988-05-10 | Nhk Spring Co Ltd | Method for joining silicon monocrystal and metal material |
| US4894293A (en) * | 1988-03-10 | 1990-01-16 | Texas Instruments Incorporated | Circuit system, a composite metal material for use therein, and a method for making the material |
| DE102011002535A1 (en) | 2010-03-12 | 2011-09-15 | Mitsubishi Electric Corporation | Semiconductor device |
| JP2012064845A (en) * | 2010-09-17 | 2012-03-29 | Mitsubishi Electric Corp | Semiconductor device and method for manufacturing the same |
| US20120080799A1 (en) * | 2010-09-30 | 2012-04-05 | Infineon Technologies Ag | Semiconductor Module Comprising an Insert and Method for Producing a Semiconductor Module Comprising an Insert |
| WO2022049878A1 (en) * | 2020-09-02 | 2022-03-10 | 日本特殊陶業株式会社 | Joined body, holding device, and electrostatic chuck |
| JP2023537644A (en) * | 2020-08-25 | 2023-09-04 | 維沃移動通信有限公司 | Chip package module and electronic equipment |
| DE102019124953B4 (en) | 2019-09-17 | 2023-09-07 | Danfoss Silicon Power Gmbh | Process for producing a cohesive connection between a semiconductor and a metal shaped body |
| US12528131B2 (en) * | 2020-06-26 | 2026-01-20 | Niterra Co., Ltd. | Joined body and electrostatic chuck |
-
1979
- 1979-01-10 JP JP150779A patent/JPS5593230A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63104778A (en) * | 1986-10-21 | 1988-05-10 | Nhk Spring Co Ltd | Method for joining silicon monocrystal and metal material |
| US4894293A (en) * | 1988-03-10 | 1990-01-16 | Texas Instruments Incorporated | Circuit system, a composite metal material for use therein, and a method for making the material |
| US8933568B2 (en) | 2010-03-12 | 2015-01-13 | Mitsubishi Electric Corporation | Semiconductor device |
| DE102011002535A1 (en) | 2010-03-12 | 2011-09-15 | Mitsubishi Electric Corporation | Semiconductor device |
| JP2011192695A (en) * | 2010-03-12 | 2011-09-29 | Mitsubishi Electric Corp | Semiconductor apparatus |
| DE102011002535B4 (en) * | 2010-03-12 | 2016-05-12 | Mitsubishi Electric Corporation | Semiconductor device with connection part |
| JP2012064845A (en) * | 2010-09-17 | 2012-03-29 | Mitsubishi Electric Corp | Semiconductor device and method for manufacturing the same |
| US8587116B2 (en) * | 2010-09-30 | 2013-11-19 | Infineon Technologies Ag | Semiconductor module comprising an insert |
| CN102446880A (en) * | 2010-09-30 | 2012-05-09 | 英飞凌科技股份有限公司 | Semiconductor module comprising insert and method for producing semiconductor module comprising insert |
| US20120080799A1 (en) * | 2010-09-30 | 2012-04-05 | Infineon Technologies Ag | Semiconductor Module Comprising an Insert and Method for Producing a Semiconductor Module Comprising an Insert |
| DE102019124953B4 (en) | 2019-09-17 | 2023-09-07 | Danfoss Silicon Power Gmbh | Process for producing a cohesive connection between a semiconductor and a metal shaped body |
| US12528131B2 (en) * | 2020-06-26 | 2026-01-20 | Niterra Co., Ltd. | Joined body and electrostatic chuck |
| JP2023537644A (en) * | 2020-08-25 | 2023-09-04 | 維沃移動通信有限公司 | Chip package module and electronic equipment |
| WO2022049878A1 (en) * | 2020-09-02 | 2022-03-10 | 日本特殊陶業株式会社 | Joined body, holding device, and electrostatic chuck |
| JPWO2022049878A1 (en) * | 2020-09-02 | 2022-03-10 | ||
| US12251923B2 (en) | 2020-09-02 | 2025-03-18 | Niterra Co., Ltd. | Joined body, holding device, and electrostatic chuck |
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