JPS5656664A - Hybrid integrated circuit - Google Patents

Hybrid integrated circuit

Info

Publication number
JPS5656664A
JPS5656664A JP13324979A JP13324979A JPS5656664A JP S5656664 A JPS5656664 A JP S5656664A JP 13324979 A JP13324979 A JP 13324979A JP 13324979 A JP13324979 A JP 13324979A JP S5656664 A JPS5656664 A JP S5656664A
Authority
JP
Japan
Prior art keywords
type region
substrate
film
sio2
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13324979A
Other languages
English (en)
Inventor
Hiroshi Kitazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13324979A priority Critical patent/JPS5656664A/ja
Publication of JPS5656664A publication Critical patent/JPS5656664A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP13324979A 1979-10-15 1979-10-15 Hybrid integrated circuit Pending JPS5656664A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13324979A JPS5656664A (en) 1979-10-15 1979-10-15 Hybrid integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13324979A JPS5656664A (en) 1979-10-15 1979-10-15 Hybrid integrated circuit

Publications (1)

Publication Number Publication Date
JPS5656664A true JPS5656664A (en) 1981-05-18

Family

ID=15100186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13324979A Pending JPS5656664A (en) 1979-10-15 1979-10-15 Hybrid integrated circuit

Country Status (1)

Country Link
JP (1) JPS5656664A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02275663A (ja) * 1989-01-24 1990-11-09 Fujitsu Ltd 半導体装置およびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02275663A (ja) * 1989-01-24 1990-11-09 Fujitsu Ltd 半導体装置およびその製造方法

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