JPS5725654A - Method of forming ions - Google Patents

Method of forming ions

Info

Publication number
JPS5725654A
JPS5725654A JP9865980A JP9865980A JPS5725654A JP S5725654 A JPS5725654 A JP S5725654A JP 9865980 A JP9865980 A JP 9865980A JP 9865980 A JP9865980 A JP 9865980A JP S5725654 A JPS5725654 A JP S5725654A
Authority
JP
Japan
Prior art keywords
gas
source
atomic number
chemically stable
supplied amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9865980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS638577B2 (fr
Inventor
Yukio Irita
Kenji Kajiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9865980A priority Critical patent/JPS5725654A/ja
Publication of JPS5725654A publication Critical patent/JPS5725654A/ja
Publication of JPS638577B2 publication Critical patent/JPS638577B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP9865980A 1980-07-21 1980-07-21 Method of forming ions Granted JPS5725654A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9865980A JPS5725654A (en) 1980-07-21 1980-07-21 Method of forming ions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9865980A JPS5725654A (en) 1980-07-21 1980-07-21 Method of forming ions

Publications (2)

Publication Number Publication Date
JPS5725654A true JPS5725654A (en) 1982-02-10
JPS638577B2 JPS638577B2 (fr) 1988-02-23

Family

ID=14225636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9865980A Granted JPS5725654A (en) 1980-07-21 1980-07-21 Method of forming ions

Country Status (1)

Country Link
JP (1) JPS5725654A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273543A (ja) * 1985-09-27 1987-04-04 Hitachi Ltd 水素イオン源
JPS63124355A (ja) * 1985-10-31 1988-05-27 ゼネラル・エレクトリック・カンパニイ イオン注入装置及び方法
JP2010517304A (ja) * 2007-01-25 2010-05-20 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド ガス希釈によるイオン源の性能向上及び寿命延長方法及び装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847890A (fr) * 1971-10-18 1973-07-06
JPS534780A (en) * 1976-07-02 1978-01-17 Tsuneo Nishida Reactionary ionic plating process

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847890A (fr) * 1971-10-18 1973-07-06
JPS534780A (en) * 1976-07-02 1978-01-17 Tsuneo Nishida Reactionary ionic plating process

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273543A (ja) * 1985-09-27 1987-04-04 Hitachi Ltd 水素イオン源
JPS63124355A (ja) * 1985-10-31 1988-05-27 ゼネラル・エレクトリック・カンパニイ イオン注入装置及び方法
JP2010517304A (ja) * 2007-01-25 2010-05-20 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド ガス希釈によるイオン源の性能向上及び寿命延長方法及び装置

Also Published As

Publication number Publication date
JPS638577B2 (fr) 1988-02-23

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