JPS5816074A - 金または金合金膜のエツチング方法 - Google Patents

金または金合金膜のエツチング方法

Info

Publication number
JPS5816074A
JPS5816074A JP56113958A JP11395881A JPS5816074A JP S5816074 A JPS5816074 A JP S5816074A JP 56113958 A JP56113958 A JP 56113958A JP 11395881 A JP11395881 A JP 11395881A JP S5816074 A JPS5816074 A JP S5816074A
Authority
JP
Japan
Prior art keywords
etching
gold
acid
alloy film
soln
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56113958A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214033B2 (2
Inventor
Susumu Furuike
進 古池
Toshio Matsuda
俊夫 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56113958A priority Critical patent/JPS5816074A/ja
Publication of JPS5816074A publication Critical patent/JPS5816074A/ja
Publication of JPS6214033B2 publication Critical patent/JPS6214033B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/30—Acidic compositions for etching other metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP56113958A 1981-07-20 1981-07-20 金または金合金膜のエツチング方法 Granted JPS5816074A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56113958A JPS5816074A (ja) 1981-07-20 1981-07-20 金または金合金膜のエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56113958A JPS5816074A (ja) 1981-07-20 1981-07-20 金または金合金膜のエツチング方法

Publications (2)

Publication Number Publication Date
JPS5816074A true JPS5816074A (ja) 1983-01-29
JPS6214033B2 JPS6214033B2 (2) 1987-03-31

Family

ID=14625464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56113958A Granted JPS5816074A (ja) 1981-07-20 1981-07-20 金または金合金膜のエツチング方法

Country Status (1)

Country Link
JP (1) JPS5816074A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187299U (ja) * 1984-05-22 1985-12-11 安原鉄工株式会社 駆動装置内蔵型電動シヤツタ−の停止装置
JP2006199987A (ja) * 2005-01-19 2006-08-03 Mitsubishi Chemicals Corp エッチング液及びエッチング方法
WO2008026542A1 (en) * 2006-08-28 2008-03-06 Mitsubishi Chemical Corporation Etchant and etching process

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187299U (ja) * 1984-05-22 1985-12-11 安原鉄工株式会社 駆動装置内蔵型電動シヤツタ−の停止装置
JP2006199987A (ja) * 2005-01-19 2006-08-03 Mitsubishi Chemicals Corp エッチング液及びエッチング方法
WO2008026542A1 (en) * 2006-08-28 2008-03-06 Mitsubishi Chemical Corporation Etchant and etching process
JPWO2008026542A1 (ja) * 2006-08-28 2010-01-21 三菱化学株式会社 エッチング液及びエッチング方法

Also Published As

Publication number Publication date
JPS6214033B2 (2) 1987-03-31

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