JPS58166725A - 積層被覆層の開口部形成方法 - Google Patents

積層被覆層の開口部形成方法

Info

Publication number
JPS58166725A
JPS58166725A JP57050348A JP5034882A JPS58166725A JP S58166725 A JPS58166725 A JP S58166725A JP 57050348 A JP57050348 A JP 57050348A JP 5034882 A JP5034882 A JP 5034882A JP S58166725 A JPS58166725 A JP S58166725A
Authority
JP
Japan
Prior art keywords
film
window
coating layer
layer
photoresist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57050348A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644662B2 (2
Inventor
Hirokazu Kaneda
金田　裕和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP57050348A priority Critical patent/JPS58166725A/ja
Publication of JPS58166725A publication Critical patent/JPS58166725A/ja
Publication of JPS644662B2 publication Critical patent/JPS644662B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
JP57050348A 1982-03-29 1982-03-29 積層被覆層の開口部形成方法 Granted JPS58166725A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57050348A JPS58166725A (ja) 1982-03-29 1982-03-29 積層被覆層の開口部形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57050348A JPS58166725A (ja) 1982-03-29 1982-03-29 積層被覆層の開口部形成方法

Publications (2)

Publication Number Publication Date
JPS58166725A true JPS58166725A (ja) 1983-10-01
JPS644662B2 JPS644662B2 (2) 1989-01-26

Family

ID=12856403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57050348A Granted JPS58166725A (ja) 1982-03-29 1982-03-29 積層被覆層の開口部形成方法

Country Status (1)

Country Link
JP (1) JPS58166725A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5830774A (en) * 1996-06-24 1998-11-03 Motorola, Inc. Method for forming a metal pattern on a substrate

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4576382B2 (ja) 2003-07-30 2010-11-04 グラハム パッケージング カンパニー，エル ピー 容器取扱システム及びプラスチック容器の処理方法
CA2582696C (en) 2004-09-30 2017-07-18 Graham Packaging Company, L.P. Pressure container with differential vacuum panels
US9707711B2 (en) 2006-04-07 2017-07-18 Graham Packaging Company, L.P. Container having outwardly blown, invertible deep-set grips

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5830774A (en) * 1996-06-24 1998-11-03 Motorola, Inc. Method for forming a metal pattern on a substrate

Also Published As

Publication number Publication date
JPS644662B2 (2) 1989-01-26

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