JPS58168249A - 半導体装置用試験装置 - Google Patents

半導体装置用試験装置

Info

Publication number
JPS58168249A
JPS58168249A JP57051996A JP5199682A JPS58168249A JP S58168249 A JPS58168249 A JP S58168249A JP 57051996 A JP57051996 A JP 57051996A JP 5199682 A JP5199682 A JP 5199682A JP S58168249 A JPS58168249 A JP S58168249A
Authority
JP
Japan
Prior art keywords
test
chute
semiconductor devices
section
test head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57051996A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6230695B2 (2
Inventor
Naohiko Urasaki
浦崎　直彦
Masatoshi Mishima
三嶋　正敏
Shigeki Takeo
竹尾　重樹
Iwao Yamazaki
巌 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57051996A priority Critical patent/JPS58168249A/ja
Publication of JPS58168249A publication Critical patent/JPS58168249A/ja
Publication of JPS6230695B2 publication Critical patent/JPS6230695B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Chutes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57051996A 1982-03-30 1982-03-30 半導体装置用試験装置 Granted JPS58168249A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57051996A JPS58168249A (ja) 1982-03-30 1982-03-30 半導体装置用試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57051996A JPS58168249A (ja) 1982-03-30 1982-03-30 半導体装置用試験装置

Publications (2)

Publication Number Publication Date
JPS58168249A true JPS58168249A (ja) 1983-10-04
JPS6230695B2 JPS6230695B2 (2) 1987-07-03

Family

ID=12902454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57051996A Granted JPS58168249A (ja) 1982-03-30 1982-03-30 半導体装置用試験装置

Country Status (1)

Country Link
JP (1) JPS58168249A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196378U (2) * 1984-11-29 1986-06-20
JPS62116546U (2) * 1986-01-16 1987-07-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196378U (2) * 1984-11-29 1986-06-20
JPS62116546U (2) * 1986-01-16 1987-07-24

Also Published As

Publication number Publication date
JPS6230695B2 (2) 1987-07-03

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