JPS58223625A - ３−５族化合物基体の表面処理方法 - Google Patents

３−５族化合物基体の表面処理方法

Info

Publication number
JPS58223625A
JPS58223625A JP57104945A JP10494582A JPS58223625A JP S58223625 A JPS58223625 A JP S58223625A JP 57104945 A JP57104945 A JP 57104945A JP 10494582 A JP10494582 A JP 10494582A JP S58223625 A JPS58223625 A JP S58223625A
Authority
JP
Japan
Prior art keywords
solution
base
substrate
aluminum
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57104945A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0323520B2 (de
Inventor
Susumu Furuike
進 古池
Toshio Matsuda
俊夫 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57104945A priority Critical patent/JPS58223625A/ja
Publication of JPS58223625A publication Critical patent/JPS58223625A/ja
Publication of JPH0323520B2 publication Critical patent/JPH0323520B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Weting (AREA)
JP57104945A 1982-06-17 1982-06-17 ３−５族化合物基体の表面処理方法 Granted JPS58223625A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57104945A JPS58223625A (ja) 1982-06-17 1982-06-17 ３−５族化合物基体の表面処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57104945A JPS58223625A (ja) 1982-06-17 1982-06-17 ３−５族化合物基体の表面処理方法

Publications (2)

Publication Number Publication Date
JPS58223625A true JPS58223625A (ja) 1983-12-26
JPH0323520B2 JPH0323520B2 (de) 1991-03-29

Family

ID=14394222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57104945A Granted JPS58223625A (ja) 1982-06-17 1982-06-17 ３−５族化合物基体の表面処理方法

Country Status (1)

Country Link
JP (1) JPS58223625A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61231723A (ja) * 1985-04-08 1986-10-16 Matsushita Electric Ind Co Ltd 化合物半導体の表面処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61231723A (ja) * 1985-04-08 1986-10-16 Matsushita Electric Ind Co Ltd 化合物半導体の表面処理方法

Also Published As

Publication number Publication date
JPH0323520B2 (de) 1991-03-29

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