JPS5843533A - ダイオ−ドペレツト極性判定装置 - Google Patents

ダイオ−ドペレツト極性判定装置

Info

Publication number
JPS5843533A
JPS5843533A JP56141033A JP14103381A JPS5843533A JP S5843533 A JPS5843533 A JP S5843533A JP 56141033 A JP56141033 A JP 56141033A JP 14103381 A JP14103381 A JP 14103381A JP S5843533 A JPS5843533 A JP S5843533A
Authority
JP
Japan
Prior art keywords
pellet
diode
pellets
vacuum
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56141033A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6230696B2 (2
Inventor
Hideo Kano
鹿野 英男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56141033A priority Critical patent/JPS5843533A/ja
Publication of JPS5843533A publication Critical patent/JPS5843533A/ja
Publication of JPS6230696B2 publication Critical patent/JPS6230696B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00Testing or measuring during manufacture or treatment of wafers, substrates or devices
JP56141033A 1981-09-09 1981-09-09 ダイオ−ドペレツト極性判定装置 Granted JPS5843533A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56141033A JPS5843533A (ja) 1981-09-09 1981-09-09 ダイオ−ドペレツト極性判定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56141033A JPS5843533A (ja) 1981-09-09 1981-09-09 ダイオ−ドペレツト極性判定装置

Publications (2)

Publication Number Publication Date
JPS5843533A true JPS5843533A (ja) 1983-03-14
JPS6230696B2 JPS6230696B2 (2) 1987-07-03

Family

ID=15282654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56141033A Granted JPS5843533A (ja) 1981-09-09 1981-09-09 ダイオ−ドペレツト極性判定装置

Country Status (1)

Country Link
JP (1) JPS5843533A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236492U (2) * 1988-08-31 1990-03-09

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4214336Y1 (2) * 1964-07-30 1967-08-16
JPS50100465U (2) * 1974-01-21 1975-08-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4214336Y1 (2) * 1964-07-30 1967-08-16
JPS50100465U (2) * 1974-01-21 1975-08-20

Also Published As

Publication number Publication date
JPS6230696B2 (2) 1987-07-03

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