JPS59110155A - 半導体メモリセル - Google Patents

半導体メモリセル

Info

Publication number
JPS59110155A
JPS59110155A JP57220582A JP22058282A JPS59110155A JP S59110155 A JPS59110155 A JP S59110155A JP 57220582 A JP57220582 A JP 57220582A JP 22058282 A JP22058282 A JP 22058282A JP S59110155 A JPS59110155 A JP S59110155A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
silicon
dioxide film
substrate
memory cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57220582A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0370382B2 (da
Inventor
Masaaki Yoshida
正昭 吉田
Toshiyuki Ishijima
石嶋　俊之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57220582A priority Critical patent/JPS59110155A/ja
Publication of JPS59110155A publication Critical patent/JPS59110155A/ja
Publication of JPH0370382B2 publication Critical patent/JPH0370382B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP57220582A 1982-12-16 1982-12-16 半導体メモリセル Granted JPS59110155A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57220582A JPS59110155A (ja) 1982-12-16 1982-12-16 半導体メモリセル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57220582A JPS59110155A (ja) 1982-12-16 1982-12-16 半導体メモリセル

Publications (2)

Publication Number Publication Date
JPS59110155A true JPS59110155A (ja) 1984-06-26
JPH0370382B2 JPH0370382B2 (da) 1991-11-07

Family

ID=16753226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57220582A Granted JPS59110155A (ja) 1982-12-16 1982-12-16 半導体メモリセル

Country Status (1)

Country Link
JP (1) JPS59110155A (da)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6115362A (ja) * 1984-06-29 1986-01-23 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション ダイナミツクｒａｍセル
JPH0296368A (ja) * 1988-09-30 1990-04-09 Ricoh Co Ltd 半導体メモリ装置
JPH02135776A (ja) * 1988-11-17 1990-05-24 Hitachi Ltd 半導体記憶装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6115362A (ja) * 1984-06-29 1986-01-23 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション ダイナミツクｒａｍセル
JPH0296368A (ja) * 1988-09-30 1990-04-09 Ricoh Co Ltd 半導体メモリ装置
JPH02135776A (ja) * 1988-11-17 1990-05-24 Hitachi Ltd 半導体記憶装置

Also Published As

Publication number Publication date
JPH0370382B2 (da) 1991-11-07

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