JPS59228736A - 多層配線構造 - Google Patents

多層配線構造

Info

Publication number
JPS59228736A
JPS59228736A JP10379383A JP10379383A JPS59228736A JP S59228736 A JPS59228736 A JP S59228736A JP 10379383 A JP10379383 A JP 10379383A JP 10379383 A JP10379383 A JP 10379383A JP S59228736 A JPS59228736 A JP S59228736A
Authority
JP
Japan
Prior art keywords
electrode
layer
lower layer
insulating layer
difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10379383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0337734B2 (2
Inventor
Sadazumi Shiraishi
白石　貞純
Yukio Motoyoshi
本吉　幸雄
Katsuaki Saida
斉田　克明
Seiji Kuwabara
誠治 桑原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Seiko Instruments and Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc, Seiko Instruments and Electronics Ltd filed Critical Seiko Instruments Inc
Priority to JP10379383A priority Critical patent/JPS59228736A/ja
Publication of JPS59228736A publication Critical patent/JPS59228736A/ja
Publication of JPH0337734B2 publication Critical patent/JPH0337734B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10379383A 1983-06-10 1983-06-10 多層配線構造 Granted JPS59228736A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10379383A JPS59228736A (ja) 1983-06-10 1983-06-10 多層配線構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10379383A JPS59228736A (ja) 1983-06-10 1983-06-10 多層配線構造

Publications (2)

Publication Number Publication Date
JPS59228736A true JPS59228736A (ja) 1984-12-22
JPH0337734B2 JPH0337734B2 (2) 1991-06-06

Family

ID=14363274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10379383A Granted JPS59228736A (ja) 1983-06-10 1983-06-10 多層配線構造

Country Status (1)

Country Link
JP (1) JPS59228736A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61193454A (ja) * 1985-02-20 1986-08-27 Mitsubishi Electric Corp 半導体装置
JPS6412552A (en) * 1987-07-07 1989-01-17 Nec Corp Wiring structure of semiconductor device
JPH0543565U (ja) * 1991-11-13 1993-06-11 三洋電機株式会社 マルチビーム半導体レーザ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61193454A (ja) * 1985-02-20 1986-08-27 Mitsubishi Electric Corp 半導体装置
JPS6412552A (en) * 1987-07-07 1989-01-17 Nec Corp Wiring structure of semiconductor device
JPH0543565U (ja) * 1991-11-13 1993-06-11 三洋電機株式会社 マルチビーム半導体レーザ装置

Also Published As

Publication number Publication date
JPH0337734B2 (2) 1991-06-06

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