JPS5975596U - turbo molecular pump - Google Patents

turbo molecular pump

Info

Publication number
JPS5975596U
JPS5975596U JP17207182U JP17207182U JPS5975596U JP S5975596 U JPS5975596 U JP S5975596U JP 17207182 U JP17207182 U JP 17207182U JP 17207182 U JP17207182 U JP 17207182U JP S5975596 U JPS5975596 U JP S5975596U
Authority
JP
Japan
Prior art keywords
stator
molecular pump
turbo
blades
circumferential direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17207182U
Other languages
Japanese (ja)
Other versions
JPS6226638Y2 (en
Inventor
潔 成田
川口　重一
岡村　治郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP17207182U priority Critical patent/JPS5975596U/en
Publication of JPS5975596U publication Critical patent/JPS5975596U/en
Application granted granted Critical
Publication of JPS6226638Y2 publication Critical patent/JPS6226638Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案のターボ分子ポンプの固定子および静翼
の一実施例における製造過程を示す要部平面図、第２図
は本考案のポンプの要部拡大断面図である。 １・・・回転子、２・・・固定子、２１・・・スリット
、２２・・・静翼、２３・・・くびれ部、４・・・スペ
ーサ。FIG. 1 is a plan view of a main part showing the manufacturing process of an embodiment of the stator and stationary vane of a turbomolecular pump of the present invention, and FIG. 2 is an enlarged sectional view of the main part of the pump of the present invention. DESCRIPTION OF SYMBOLS 1... Rotor, 2... Stator, 21... Slit, 22... Stationary blade, 23... Neck part, 4... Spacer.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）円周方向に多数の動翼をもつ回転子の複数段が同
心に配列され、各段の中間に円周方向へ多数の静翼をも
つ固定子がスペーサを介して配置されてなるターボ分子
ポンプにおいて、前記回転子の少なくとも動翼はアルミ
ニウムからなり、かつ、その表面が耐蝕性処理膜で被覆
され、前記固定子は不銹鋼からなることを特徴とするタ
ーボ分子ポンプ。(1) Multiple stages of rotors having a large number of moving blades in the circumferential direction are arranged concentrically, and a stator having a large number of stator blades in the circumferential direction is placed between each stage with a spacer interposed therebetween. A turbo-molecular pump characterized in that at least the rotor blades are made of aluminum, the surface thereof is coated with a corrosion-resistant treated film, and the stator is made of stainless steel. （２）固定子は薄板円環の同一円周上の等間隔位置に１
字状スリットが設けられ、該スリットに挾まれた部分が
板曲されて静翼が形成された実用新案登録請求の範囲第
１項記載のターボ分子ポンプ。(2) The stators are placed at equal intervals on the same circumference of the thin plate ring.
The turbo-molecular pump according to claim 1, wherein a letter-shaped slit is provided, and a portion sandwiched by the slit is bent to form a stator vane.
JP17207182U 1982-11-12 1982-11-12 turbo molecular pump Granted JPS5975596U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17207182U JPS5975596U (en) 1982-11-12 1982-11-12 turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17207182U JPS5975596U (en) 1982-11-12 1982-11-12 turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS5975596U true JPS5975596U (en) 1984-05-22
JPS6226638Y2 JPS6226638Y2 (en) 1987-07-08

Family

ID=30375182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17207182U Granted JPS5975596U (en) 1982-11-12 1982-11-12 turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS5975596U (en)

Also Published As

Publication number Publication date
JPS6226638Y2 (en) 1987-07-08

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