JPS5990177A - 混成パタ−ン検査装置 - Google Patents

混成パタ−ン検査装置

Info

Publication number
JPS5990177A
JPS5990177A JP57198881A JP19888182A JPS5990177A JP S5990177 A JPS5990177 A JP S5990177A JP 57198881 A JP57198881 A JP 57198881A JP 19888182 A JP19888182 A JP 19888182A JP S5990177 A JPS5990177 A JP S5990177A
Authority
JP
Japan
Prior art keywords
pattern
window
hybrid
hybrid pattern
windows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57198881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0126113B2 (fr
Inventor
Michiaki Miyagawa
宮川　道明
Toshimi Kodaira
小平　俊実
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP57198881A priority Critical patent/JPS5990177A/ja
Publication of JPS5990177A publication Critical patent/JPS5990177A/ja
Publication of JPH0126113B2 publication Critical patent/JPH0126113B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G06V10/50—Extraction of image or video features by performing operations within image blocks; by using histograms, e.g. histogram of oriented gradients [HoG]; by summing image-intensity values; Projection analysis
    • G06V10/507—Summing image-intensity values; Histogram projection analysis

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP57198881A 1982-11-15 1982-11-15 混成パタ−ン検査装置 Granted JPS5990177A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57198881A JPS5990177A (ja) 1982-11-15 1982-11-15 混成パタ−ン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57198881A JPS5990177A (ja) 1982-11-15 1982-11-15 混成パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS5990177A true JPS5990177A (ja) 1984-05-24
JPH0126113B2 JPH0126113B2 (fr) 1989-05-22

Family

ID=16398471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57198881A Granted JPS5990177A (ja) 1982-11-15 1982-11-15 混成パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS5990177A (fr)

Also Published As

Publication number Publication date
JPH0126113B2 (fr) 1989-05-22

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