JPS60140723A - ドライエッチング方法 - Google Patents

ドライエッチング方法

Info

Publication number
JPS60140723A
JPS60140723A JP58245227A JP24522783A JPS60140723A JP S60140723 A JPS60140723 A JP S60140723A JP 58245227 A JP58245227 A JP 58245227A JP 24522783 A JP24522783 A JP 24522783A JP S60140723 A JPS60140723 A JP S60140723A
Authority
JP
Japan
Prior art keywords
cooling
electrode
temperature
side electrode
dry etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58245227A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363806B2 (mo
Inventor
Jun Kanamori
金森　順
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58245227A priority Critical patent/JPS60140723A/ja
Publication of JPS60140723A publication Critical patent/JPS60140723A/ja
Publication of JPH0363806B2 publication Critical patent/JPH0363806B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP58245227A 1983-12-28 1983-12-28 ドライエッチング方法 Granted JPS60140723A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58245227A JPS60140723A (ja) 1983-12-28 1983-12-28 ドライエッチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58245227A JPS60140723A (ja) 1983-12-28 1983-12-28 ドライエッチング方法

Publications (2)

Publication Number Publication Date
JPS60140723A true JPS60140723A (ja) 1985-07-25
JPH0363806B2 JPH0363806B2 (mo) 1991-10-02

Family

ID=17130537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58245227A Granted JPS60140723A (ja) 1983-12-28 1983-12-28 ドライエッチング方法

Country Status (1)

Country Link
JP (1) JPS60140723A (mo)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163030A (ja) * 1984-08-20 1986-04-01 Kokusai Electric Co Ltd プラズマエッチング装置の電極温度制御方法
JPS6310522A (ja) * 1986-07-02 1988-01-18 Sony Corp ドライエツチング方法
JPS63284820A (ja) * 1987-05-15 1988-11-22 Fujitsu Ltd ドライエッチング装置
JPH04180222A (ja) * 1990-11-15 1992-06-26 Anelva Corp エッチング方法および装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440079A (en) * 1977-09-05 1979-03-28 Fujitsu Ltd Plasma etching method
JPS5853833A (ja) * 1981-09-26 1983-03-30 Toshiba Corp プラズマエツチング装置
JPS58153332A (ja) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp ドライエツチング装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440079A (en) * 1977-09-05 1979-03-28 Fujitsu Ltd Plasma etching method
JPS5853833A (ja) * 1981-09-26 1983-03-30 Toshiba Corp プラズマエツチング装置
JPS58153332A (ja) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp ドライエツチング装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163030A (ja) * 1984-08-20 1986-04-01 Kokusai Electric Co Ltd プラズマエッチング装置の電極温度制御方法
JPS6310522A (ja) * 1986-07-02 1988-01-18 Sony Corp ドライエツチング方法
JPS63284820A (ja) * 1987-05-15 1988-11-22 Fujitsu Ltd ドライエッチング装置
JPH04180222A (ja) * 1990-11-15 1992-06-26 Anelva Corp エッチング方法および装置

Also Published As

Publication number Publication date
JPH0363806B2 (mo) 1991-10-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term