JPS60200978A - Clad vessel - Google Patents

Abstract

PURPOSE:To obtain a vessel having superior consumption resistance and a long life by cladding the surface of a Ta-base metal with an Rh-base metal. CONSTITUTION:When a Ta or Ta alloy vessel is used as a crucible for melting glass or ore contg. metallic oxide at a high temp. or as a tray, a boat or the like for vacuum deposition, oxide is easily formed by a reaction with O2 in the air, so the vessel is required to be used in an inert atmosphere. Even though the vessel is used in such a way, when glass, ore or the like contg. metallic oxide is melted, O contained in the resulting melt bonds to Ta to shorten the life of the vessel. The surface of the vessel is clad with Rh or an Rh alloy by physical vapor deposition such as ion plating so as to obtain a vessel having superior oxidation resistance and a long life.

Description

[Detailed description of the invention] TECHNICAL FIELD The present invention relates to a clad container.

Conventionally, containers for ``a'' or Ta alloys have been used for high-temperature glass, melting holes for ores containing metal oxides, trays for vacuum evaporation,
It was widely used in po-1-nato. This is '1-
This is because the melting point of a is extremely high at about 3000'C, and it is ductile and malleable, so it can be easily processed. On the other hand, 1゛a tends to react with oxygen in the air and form oxides when the temperature exceeds 400°C, so it had to be used in an inert atmosphere, which was a hassle. Furthermore, even if used in such an inert atmosphere, if you want to store crows or ores containing metal oxides in a 1 volume container, 4J! Oxygen contained in substances and Ta combine to form oxides,
The disadvantage was that 1゛a of the container was eluted and the life of the container was short. For this reason, attempts have been made to improve wear resistance by adding other metals to the alloy, but the reality is that no alloy sufficient to prevent the oxidation of '1'a has yet been discovered.

The present invention has been made in view of the above-mentioned drawbacks, and an object of the present invention is to provide a long-life container with excellent wear resistance.

The present invention provides Rh or Rh on the surface of Ta or 'Fa alloy.
This is a clad container characterized by being coated with an alloy.

In the present invention, the use of lh or Rh alloy means that R
The melting point of h is 1960°C, which is as high as '1'a, and if it exceeds 600°C, it will react with oxygen and oxidize.
This is because it decomposes at 100°C and has excellent oxidation resistance, particularly against metal oxides. However, containers made of solid Rh or Rh alloy are expensive and difficult to process, so we decided to cover them. Physical vapor deposition such as ion blasting, sputtering, or vapor deposition is better than wet vapor deposition for coating. According to physical vapor deposition, Rh atoms are buried in the surface layer of the 'pa container, and the adhesion strength of the bonding surface between 'l'a and Hk+ is increased by 1.
°b (shallow area strength).This is because a high crack container can be obtained.

As described above, the crucible coated with Rh or Rh alloy has excellent oxidation resistance and excellent mechanical strength of the joint surface, so it has a long life. In addition, as the Rh alloy, pt-
There are Rh and 1r-Rh.

Examples and conventional examples will be described below.

[Example 1] Rh was ion-blasted to a thickness of 10 μm on the inner wall of a U-shaped cross-sectional 'I'' a M crucible having a wall thickness of 5 mm, a II stone size of 100 mm, and an inner diameter of 80 mm under the following conditions.

Atmospheric gas: 2.0 x 10 ml, 11 g Ionization voltage, current: 40 V, 5 A Electron beam solubility: 9 kV, 300 +nA Thermal electron: IOV, 1oOA This is designated as Practical Product 1.

[Example 2] I) L-Rh alloy was magnetron sputter-linked to a thickness of 0.1 mm on the inner and outer walls of a TaM crucible having the same shape as in Example 1 under the following conditions.

Pressure: Ar gas 3 X iOmm l1g applied tortoise pressure:
400V high frequency power supply: 13.56 Mllz This is considered as practical product 2.

[Conventional example]

The 'raM crucible used in Example 1 was made into a conventional product.

Next, 500 g of alkali zinc borosilicate glass was added to the above practical products 1 and 2 and the conventional product in an Ar atmosphere at a temperature of about 1200°C.
It was used for 60 minutes. When this process was repeated 10 times, 50 μm of the conventional product was removed from the surface of the container, while 10 μm of practical product 1 and 5 μm of practical product 2 were removed.

Next, when the bottoms of the containers of Practical Product 2 and the conventional example were directly heated with a heater in the air and held at a temperature of about 1000°C for 10 hours, most of the Ta in the conventional example was oxidized, but the actual Product 2 was hardly oxidized.

The hardness of the surface layer of the conventional product and the hardness of the boundary layer of the practical product 1.2 are 10011v, 160Hv, and 13011V, respectively.
It was in v.

From these facts, the crucible of the present invention has significantly superior oxidation resistance as a crucible for dissolving metal oxides compared to conventional products, and Practical Product 2, which is coated with Rh alloy up to the outer wall, is oxidation resistant even when heated in the atmosphere. You can tell whether it's sex or superiority. Also,
The hardness of the boundary layer of the practical product is higher than that of the surface layer of the conventional product, which indicates that the practical product has excellent mechanical strength.

As described in detail above, the present invention can provide a clad container with excellent wear resistance and long life. Moreover, if the container made of '1゛a is completely coated, it can be replaced with a long-life one even in the atmosphere, does not require extensive installation, and can be done with expensive Rh or small stars. Become.

Applicant Tanaka Kikinzoku Kogyo Co., Ltd.

Claims (1)

[Claims] '] 17h or 1211 on the surface of 'd or '1a alloy
3. A crat container characterized by being coated with an alloy.