JPS61149813A - 振動する物体の表面検査装置 - Google Patents

振動する物体の表面検査装置

Info

Publication number
JPS61149813A
JPS61149813A JP28050584A JP28050584A JPS61149813A JP S61149813 A JPS61149813 A JP S61149813A JP 28050584 A JP28050584 A JP 28050584A JP 28050584 A JP28050584 A JP 28050584A JP S61149813 A JPS61149813 A JP S61149813A
Authority
JP
Japan
Prior art keywords
tracking
output
change point
reflected light
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28050584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0569163B2 (2
Inventor
Kenichi Matsui
健一 松井
Mitsuhito Kamei
光仁 亀井
Mikio Tachibana
橘　幹夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Nippon Steel Corp
Original Assignee
Mitsubishi Electric Corp
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Sumitomo Metal Industries Ltd filed Critical Mitsubishi Electric Corp
Priority to JP28050584A priority Critical patent/JPS61149813A/ja
Publication of JPS61149813A publication Critical patent/JPS61149813A/ja
Publication of JPH0569163B2 publication Critical patent/JPH0569163B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP28050584A 1984-12-24 1984-12-24 振動する物体の表面検査装置 Granted JPS61149813A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28050584A JPS61149813A (ja) 1984-12-24 1984-12-24 振動する物体の表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28050584A JPS61149813A (ja) 1984-12-24 1984-12-24 振動する物体の表面検査装置

Publications (2)

Publication Number Publication Date
JPS61149813A true JPS61149813A (ja) 1986-07-08
JPH0569163B2 JPH0569163B2 (2) 1993-09-30

Family

ID=17626024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28050584A Granted JPS61149813A (ja) 1984-12-24 1984-12-24 振動する物体の表面検査装置

Country Status (1)

Country Link
JP (1) JPS61149813A (2)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112304A (en) * 1976-03-17 1977-09-20 Victor Co Of Japan Ltd Contactless pick-up
JPS5932804A (ja) * 1982-08-18 1984-02-22 Chino Works Ltd 長さ測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112304A (en) * 1976-03-17 1977-09-20 Victor Co Of Japan Ltd Contactless pick-up
JPS5932804A (ja) * 1982-08-18 1984-02-22 Chino Works Ltd 長さ測定装置

Also Published As

Publication number Publication date
JPH0569163B2 (2) 1993-09-30

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