JPS61153954U - - Google Patents

Info

Publication number
JPS61153954U
JPS61153954U JP3742385U JP3742385U JPS61153954U JP S61153954 U JPS61153954 U JP S61153954U JP 3742385 U JP3742385 U JP 3742385U JP 3742385 U JP3742385 U JP 3742385U JP S61153954 U JPS61153954 U JP S61153954U
Authority
JP
Japan
Prior art keywords
sample
scanning
rotator
electrical deflection
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3742385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3742385U priority Critical patent/JPS61153954U/ja
Publication of JPS61153954U publication Critical patent/JPS61153954U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
JP3742385U 1985-03-18 1985-03-18 Pending JPS61153954U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3742385U JPS61153954U (fr) 1985-03-18 1985-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3742385U JPS61153954U (fr) 1985-03-18 1985-03-18

Publications (1)

Publication Number Publication Date
JPS61153954U true JPS61153954U (fr) 1986-09-24

Family

ID=30543487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3742385U Pending JPS61153954U (fr) 1985-03-18 1985-03-18

Country Status (1)

Country Link
JP (1) JPS61153954U (fr)

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