JPS6117737A - 真空装置における振動緩衝用構造 - Google Patents

真空装置における振動緩衝用構造

Info

Publication number: JPS6117737A
Authority: JP; Japan
Prior art keywords: vacuum; vacuum generator; compensating; compensating member; container
Prior art date: 1984-05-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP9397485A

Other languages

English (en)

Japanese (ja)

Inventor

ルーデイ・ノイラント

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Jenoptik AG

Original Assignee

VEB Carl Zeiss Jena GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-05-02

Filing date

1985-05-02

Publication date

1986-01-25

1985-05-02 Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH

1986-01-25 Publication of JPS6117737A publication Critical patent/JPS6117737A/ja

Status Pending legal-status Critical Current

Links

238000013016 damping Methods 0.000 title claims description 14
239000000463 material Substances 0.000 claims description 9
230000003068 static effect Effects 0.000 claims description 2
125000006850 spacer group Chemical group 0.000 description 8
238000002955 isolation Methods 0.000 description 5
230000000694 effects Effects 0.000 description 3
238000005516 engineering process Methods 0.000 description 3
239000006096 absorbing agent Substances 0.000 description 2
230000008878 coupling Effects 0.000 description 2
238000010168 coupling process Methods 0.000 description 2
238000005859 coupling reaction Methods 0.000 description 2
238000010894 electron beam technology Methods 0.000 description 2
230000035939 shock Effects 0.000 description 2
238000010521 absorption reaction Methods 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
230000006835 compression Effects 0.000 description 1
238000007906 compression Methods 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
230000005284 excitation Effects 0.000 description 1
238000000605 extraction Methods 0.000 description 1
238000000034 method Methods 0.000 description 1
238000005457 optimization Methods 0.000 description 1
239000002245 particle Substances 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Vibration Prevention Devices (AREA)

JP9397485A 1984-05-02 1985-05-02 真空装置における振動緩衝用構造 Pending JPS6117737A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DD16F/262557-1		1984-05-02
DD26255784A DD238175A3 (de)	1984-05-02	1984-05-02	Einrichtung zur schwingungsdaempfung in vakuumsystemen

Publications (1)

Publication Number	Publication Date
JPS6117737A true JPS6117737A (ja)	1986-01-25

Family

ID=5556655

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP9397485A Pending JPS6117737A (ja)	1984-05-02	1985-05-02	真空装置における振動緩衝用構造

Country Status (6)

Country	Link
JP (1)	JPS6117737A (de)
DD (1)	DD238175A3 (de)
DE (1)	DE3508575A1 (de)
FR (1)	FR2563883B1 (de)
GB (1)	GB2159891B (de)
SU (1)	SU1502889A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4949155A (en) *	1987-07-14	1990-08-14	Sharp Kabushiki Kaisha	Tape carrier for semiconductor chips
JPH0681894A (ja) *	1992-08-31	1994-03-22	Hitachi Zosen Corp	真空容器の緩衝装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE20202893U1 (de) *	2002-02-25	2003-07-03	Sachsenring Fahrzeugtechnik Gm	Vorrichtung zur Lagerung einer Kolbenverdichterbaugruppe
DE102004012677A1 (de) *	2004-03-16	2005-10-13	Leybold Vakuum Gmbh	Vakuumsystem

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4363217A (en) *	1981-01-29	1982-12-14	Venuti Guy S	Vibration damping apparatus
JPS57188787A (en) *	1981-05-18	1982-11-19	Toshiba Corp	Vibration-proof mechanism for vacuum pump
JPS6065288A (ja) *	1983-09-21	1985-04-15	Hitachi Ltd	クライオポンプ

1984
- 1984-05-02 DD DD26255784A patent/DD238175A3/de not_active IP Right Cessation
1985
- 1985-03-11 DE DE19853508575 patent/DE3508575A1/de not_active Withdrawn
- 1985-03-19 SU SU857773781A patent/SU1502889A1/ru active
- 1985-04-16 FR FR8505706A patent/FR2563883B1/fr not_active Expired
- 1985-05-01 GB GB08511024A patent/GB2159891B/en not_active Expired
- 1985-05-02 JP JP9397485A patent/JPS6117737A/ja active Pending

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4949155A (en) *	1987-07-14	1990-08-14	Sharp Kabushiki Kaisha	Tape carrier for semiconductor chips
JPH0681894A (ja) *	1992-08-31	1994-03-22	Hitachi Zosen Corp	真空容器の緩衝装置

Also Published As

Publication number	Publication date
DD238175A3 (de)	1986-08-13
FR2563883A1 (fr)	1985-11-08
GB2159891B (en)	1987-07-01
GB8511024D0 (en)	1985-06-12
FR2563883B1 (fr)	1989-12-08
DE3508575A1 (de)	1985-11-07
GB2159891A (en)	1985-12-11
SU1502889A1 (ru)	1989-08-23

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