JPS6119115B2 - - Google Patents

Info

Publication number
JPS6119115B2
JPS6119115B2 JP13251180A JP13251180A JPS6119115B2 JP S6119115 B2 JPS6119115 B2 JP S6119115B2 JP 13251180 A JP13251180 A JP 13251180A JP 13251180 A JP13251180 A JP 13251180A JP S6119115 B2 JPS6119115 B2 JP S6119115B2
Authority
JP
Japan
Prior art keywords
layer
wiring
wiring layer
cross
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13251180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5758335A (en
Inventor
Naoki Kato
Kazuyoshi Asai
Kazuo Nagafune
Masayuki Ino
Katsuhiko Kurumada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13251180A priority Critical patent/JPS5758335A/ja
Publication of JPS5758335A publication Critical patent/JPS5758335A/ja
Publication of JPS6119115B2 publication Critical patent/JPS6119115B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP13251180A 1980-09-24 1980-09-24 Cross wiring device and manufacture thereof Granted JPS5758335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13251180A JPS5758335A (en) 1980-09-24 1980-09-24 Cross wiring device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13251180A JPS5758335A (en) 1980-09-24 1980-09-24 Cross wiring device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5758335A JPS5758335A (en) 1982-04-08
JPS6119115B2 true JPS6119115B2 (2) 1986-05-15

Family

ID=15083046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13251180A Granted JPS5758335A (en) 1980-09-24 1980-09-24 Cross wiring device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5758335A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61133645A (ja) * 1984-12-04 1986-06-20 Toshiba Corp 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPS5758335A (en) 1982-04-08

Similar Documents

Publication Publication Date Title
JPH027544A (ja) 柱の整合及び製造工程
JPS58216445A (ja) 半導体装置およびその製造方法
JPS6119115B2 (2)
JPS63250155A (ja) 半導体装置の製造方法
JPH02285658A (ja) 半導体装置の製造方法
JP2508831B2 (ja) 半導体装置
JPS61112353A (ja) 多層配線の形成方法
JPS62293644A (ja) 半導体装置の製造方法
US6066895A (en) Interconnecting structure for semiconductor integrated circuits and method
JPS5839055A (ja) 半導体装置
JPS62136857A (ja) 半導体装置の製造方法
JPS62222654A (ja) 半導体装置の製造方法
JPS6149439A (ja) 半導体装置の製造方法
JPS6149438A (ja) 半導体装置
JPH04303943A (ja) 半導体装置の製造方法
JPH02111052A (ja) 多層配線形成法
JPH0611080B2 (ja) 半導体装置の製造方法
JPH03286563A (ja) 半導体装置およびその製造方法
JPS6057648A (ja) 金属配線パタ−ン形成方法
JPS63224273A (ja) ジヨセフソン接合素子とその作製方法
JPH043962A (ja) 半導体装置およびその製造方法
JPS6149437A (ja) 半導体装置
JPS6328335B2 (2)
JPH0536842A (ja) 多層配線形成法
JPH0358424A (ja) 配線接続孔の形成方法